JPS63139754U - - Google Patents

Info

Publication number
JPS63139754U
JPS63139754U JP3239487U JP3239487U JPS63139754U JP S63139754 U JPS63139754 U JP S63139754U JP 3239487 U JP3239487 U JP 3239487U JP 3239487 U JP3239487 U JP 3239487U JP S63139754 U JPS63139754 U JP S63139754U
Authority
JP
Japan
Prior art keywords
refrigerant
emitter
tank
gas
recovery pipe
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP3239487U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0353404Y2 (OSRAM
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP3239487U priority Critical patent/JPH0353404Y2/ja
Publication of JPS63139754U publication Critical patent/JPS63139754U/ja
Application granted granted Critical
Publication of JPH0353404Y2 publication Critical patent/JPH0353404Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Rigid Pipes And Flexible Pipes (AREA)
  • Electron Sources, Ion Sources (AREA)
JP3239487U 1987-03-05 1987-03-05 Expired JPH0353404Y2 (OSRAM)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3239487U JPH0353404Y2 (OSRAM) 1987-03-05 1987-03-05

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3239487U JPH0353404Y2 (OSRAM) 1987-03-05 1987-03-05

Publications (2)

Publication Number Publication Date
JPS63139754U true JPS63139754U (OSRAM) 1988-09-14
JPH0353404Y2 JPH0353404Y2 (OSRAM) 1991-11-21

Family

ID=30839029

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3239487U Expired JPH0353404Y2 (OSRAM) 1987-03-05 1987-03-05

Country Status (1)

Country Link
JP (1) JPH0353404Y2 (OSRAM)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009289670A (ja) * 2008-05-30 2009-12-10 Hitachi High-Technologies Corp イオンビーム装置
WO2009147894A1 (ja) * 2008-06-05 2009-12-10 株式会社日立ハイテクノロジーズ イオンビーム装置
WO2011001600A1 (ja) * 2009-06-30 2011-01-06 株式会社 日立ハイテクノロジーズ イオン顕微鏡
JP2015092496A (ja) * 2014-12-26 2015-05-14 株式会社日立ハイテクノロジーズ イオンビーム装置
JP2020129547A (ja) * 2020-04-22 2020-08-27 株式会社日立ハイテク ガリウム集束イオンビームとイオン顕微鏡複合装置

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009289670A (ja) * 2008-05-30 2009-12-10 Hitachi High-Technologies Corp イオンビーム装置
WO2009147894A1 (ja) * 2008-06-05 2009-12-10 株式会社日立ハイテクノロジーズ イオンビーム装置
JP5097823B2 (ja) * 2008-06-05 2012-12-12 株式会社日立ハイテクノロジーズ イオンビーム装置
WO2011001600A1 (ja) * 2009-06-30 2011-01-06 株式会社 日立ハイテクノロジーズ イオン顕微鏡
JP2011014245A (ja) * 2009-06-30 2011-01-20 Hitachi High-Technologies Corp イオン顕微鏡
US8455841B2 (en) 2009-06-30 2013-06-04 Hitachi High-Technologies Corporation Ion microscope
JP2015092496A (ja) * 2014-12-26 2015-05-14 株式会社日立ハイテクノロジーズ イオンビーム装置
JP2020129547A (ja) * 2020-04-22 2020-08-27 株式会社日立ハイテク ガリウム集束イオンビームとイオン顕微鏡複合装置

Also Published As

Publication number Publication date
JPH0353404Y2 (OSRAM) 1991-11-21

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