JPS6313337B2 - - Google Patents

Info

Publication number
JPS6313337B2
JPS6313337B2 JP55136595A JP13659580A JPS6313337B2 JP S6313337 B2 JPS6313337 B2 JP S6313337B2 JP 55136595 A JP55136595 A JP 55136595A JP 13659580 A JP13659580 A JP 13659580A JP S6313337 B2 JPS6313337 B2 JP S6313337B2
Authority
JP
Japan
Prior art keywords
electron beam
electron
deflection
exposure apparatus
deviation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP55136595A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5760842A (en
Inventor
Mamoru Nakasuji
Sadao Sasaki
Mineo Goto
Ryoichi Yoshikawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Shibaura Electric Co Ltd filed Critical Tokyo Shibaura Electric Co Ltd
Priority to JP55136595A priority Critical patent/JPS5760842A/ja
Publication of JPS5760842A publication Critical patent/JPS5760842A/ja
Publication of JPS6313337B2 publication Critical patent/JPS6313337B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Electron Beam Exposure (AREA)
JP55136595A 1980-09-30 1980-09-30 Electron beam exposure device Granted JPS5760842A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP55136595A JPS5760842A (en) 1980-09-30 1980-09-30 Electron beam exposure device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP55136595A JPS5760842A (en) 1980-09-30 1980-09-30 Electron beam exposure device

Publications (2)

Publication Number Publication Date
JPS5760842A JPS5760842A (en) 1982-04-13
JPS6313337B2 true JPS6313337B2 (enExample) 1988-03-25

Family

ID=15178965

Family Applications (1)

Application Number Title Priority Date Filing Date
JP55136595A Granted JPS5760842A (en) 1980-09-30 1980-09-30 Electron beam exposure device

Country Status (1)

Country Link
JP (1) JPS5760842A (enExample)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6182428A (ja) * 1984-09-29 1986-04-26 Toshiba Corp 電荷ビ−ム光学鏡筒のレンズ調整方法
JPH0789684B2 (ja) * 1985-07-18 1995-09-27 日本航空株式会社 吸引式磁気浮上車輌の軌道構造

Also Published As

Publication number Publication date
JPS5760842A (en) 1982-04-13

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