JPS63124473A - ヘテロ構造電界効果トランジスタ - Google Patents

ヘテロ構造電界効果トランジスタ

Info

Publication number
JPS63124473A
JPS63124473A JP61271324A JP27132486A JPS63124473A JP S63124473 A JPS63124473 A JP S63124473A JP 61271324 A JP61271324 A JP 61271324A JP 27132486 A JP27132486 A JP 27132486A JP S63124473 A JPS63124473 A JP S63124473A
Authority
JP
Japan
Prior art keywords
layer
type
electrode
germanium
gallium arsenide
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP61271324A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0334212B2 (enrdf_load_stackoverflow
Inventor
Junichi Sone
曾根　純一
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp filed Critical NEC Corp
Priority to JP61271324A priority Critical patent/JPS63124473A/ja
Publication of JPS63124473A publication Critical patent/JPS63124473A/ja
Publication of JPH0334212B2 publication Critical patent/JPH0334212B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D62/00—Semiconductor bodies, or regions thereof, of devices having potential barriers
    • H10D62/80—Semiconductor bodies, or regions thereof, of devices having potential barriers characterised by the materials
    • H10D62/82—Heterojunctions
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D30/00—Field-effect transistors [FET]
    • H10D30/40—FETs having zero-dimensional [0D], one-dimensional [1D] or two-dimensional [2D] charge carrier gas channels
    • H10D30/47—FETs having zero-dimensional [0D], one-dimensional [1D] or two-dimensional [2D] charge carrier gas channels having 2D charge carrier gas channels, e.g. nanoribbon FETs or high electron mobility transistors [HEMT]
    • H10D30/471—High electron mobility transistors [HEMT] or high hole mobility transistors [HHMT]
    • H10D30/473—High electron mobility transistors [HEMT] or high hole mobility transistors [HHMT] having confinement of carriers by multiple heterojunctions, e.g. quantum well HEMT
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D62/00—Semiconductor bodies, or regions thereof, of devices having potential barriers
    • H10D62/80—Semiconductor bodies, or regions thereof, of devices having potential barriers characterised by the materials
    • H10D62/82—Heterojunctions
    • H10D62/822—Heterojunctions comprising only Group IV materials heterojunctions, e.g. Si/Ge heterojunctions

Landscapes

  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
  • Junction Field-Effect Transistors (AREA)
JP61271324A 1986-11-13 1986-11-13 ヘテロ構造電界効果トランジスタ Granted JPS63124473A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP61271324A JPS63124473A (ja) 1986-11-13 1986-11-13 ヘテロ構造電界効果トランジスタ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP61271324A JPS63124473A (ja) 1986-11-13 1986-11-13 ヘテロ構造電界効果トランジスタ

Publications (2)

Publication Number Publication Date
JPS63124473A true JPS63124473A (ja) 1988-05-27
JPH0334212B2 JPH0334212B2 (enrdf_load_stackoverflow) 1991-05-21

Family

ID=17498465

Family Applications (1)

Application Number Title Priority Date Filing Date
JP61271324A Granted JPS63124473A (ja) 1986-11-13 1986-11-13 ヘテロ構造電界効果トランジスタ

Country Status (1)

Country Link
JP (1) JPS63124473A (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1936697A3 (en) * 2006-12-22 2010-02-24 Imec A field effect transistor device, and methods of production thereof

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1936697A3 (en) * 2006-12-22 2010-02-24 Imec A field effect transistor device, and methods of production thereof

Also Published As

Publication number Publication date
JPH0334212B2 (enrdf_load_stackoverflow) 1991-05-21

Similar Documents

Publication Publication Date Title
US5479033A (en) Complementary junction heterostructure field-effect transistor
JP2994227B2 (ja) ひずみＳｉ／ＳｉＧｅヘテロ構造層を使用するＣＭＯＳトランジスタ用の層構造
JP3135939B2 (ja) Ｈｅｍｔ型半導体装置
EP0144242A2 (en) Compound semiconductor integrated circuit device
JPH09129751A (ja) トランジスタ用の半導体構造及び回路
JPH0371776B2 (enrdf_load_stackoverflow)
JPH027532A (ja) 積層チャネル電界効果トランジスタ
JPH0624208B2 (ja) 半導体装置
JPS59207667A (ja) 半導体装置
JP2553510B2 (ja) 半導体装置およびその製造方法
JPS61147577A (ja) 相補型半導体装置
WO1987000692A1 (fr) Dispositif a semi-conducteurs
JPS63124473A (ja) ヘテロ構造電界効果トランジスタ
JP4631104B2 (ja) 半導体装置の製造方法
JP2710309B2 (ja) ヘテロ接合電界効果トランジスタ
JP3006792B2 (ja) ヘテロ構造電界効果トランジスタ
JPH02111073A (ja) 絶縁ゲート電界効果トランジスタおよびその集積回路装置
JPS62199049A (ja) 半導体装置
JP2680821B2 (ja) ヘテロ構造電界効果トランジスタ
JP2655594B2 (ja) 集積型半導体装置
Rieh Semiconductor Technologies for THz Applications
JPS63244779A (ja) 電界効果トランジスタ
JPS6228586B2 (enrdf_load_stackoverflow)
JPH0511656B2 (enrdf_load_stackoverflow)
JP2530806B2 (ja) 相補型論理構造