JPS63121128A - 磁気記録媒体の製造方法 - Google Patents

磁気記録媒体の製造方法

Info

Publication number
JPS63121128A
JPS63121128A JP26711586A JP26711586A JPS63121128A JP S63121128 A JPS63121128 A JP S63121128A JP 26711586 A JP26711586 A JP 26711586A JP 26711586 A JP26711586 A JP 26711586A JP S63121128 A JPS63121128 A JP S63121128A
Authority
JP
Japan
Prior art keywords
substrate holder
substrate
sputtering
magnetic recording
layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP26711586A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0522294B2 (enrdf_load_stackoverflow
Inventor
Nobuyuki Takahashi
伸幸 高橋
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fuji Electric Co Ltd
Original Assignee
Fuji Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fuji Electric Co Ltd filed Critical Fuji Electric Co Ltd
Priority to JP26711586A priority Critical patent/JPS63121128A/ja
Publication of JPS63121128A publication Critical patent/JPS63121128A/ja
Publication of JPH0522294B2 publication Critical patent/JPH0522294B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
  • Manufacturing Of Magnetic Record Carriers (AREA)
  • Thin Magnetic Films (AREA)
JP26711586A 1986-11-10 1986-11-10 磁気記録媒体の製造方法 Granted JPS63121128A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP26711586A JPS63121128A (ja) 1986-11-10 1986-11-10 磁気記録媒体の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP26711586A JPS63121128A (ja) 1986-11-10 1986-11-10 磁気記録媒体の製造方法

Publications (2)

Publication Number Publication Date
JPS63121128A true JPS63121128A (ja) 1988-05-25
JPH0522294B2 JPH0522294B2 (enrdf_load_stackoverflow) 1993-03-29

Family

ID=17440272

Family Applications (1)

Application Number Title Priority Date Filing Date
JP26711586A Granted JPS63121128A (ja) 1986-11-10 1986-11-10 磁気記録媒体の製造方法

Country Status (1)

Country Link
JP (1) JPS63121128A (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPH0522294B2 (enrdf_load_stackoverflow) 1993-03-29

Similar Documents

Publication Publication Date Title
JPS63121128A (ja) 磁気記録媒体の製造方法
US4675224A (en) Magnetic recording medium
JPS62114124A (ja) 磁気デイスクの製造方法
JPS6379968A (ja) 磁気記録媒体の製造方法
US5560786A (en) Magnetic thin film material for magnetic recording
JPH0261819A (ja) 垂直磁気記録媒体
JPS60231911A (ja) 磁気記録媒体
JP2785276B2 (ja) 磁気記録媒体
JPS58169331A (ja) 磁気記録媒体
JPS59157833A (ja) 磁気記録媒体
JPS59157828A (ja) 磁気記録媒体
JPS63124213A (ja) 垂直磁気記録媒体
JPS63241724A (ja) 磁気デイスクの製造方法
JPS60202524A (ja) 磁気記録媒体
JPH04330638A (ja) 磁気ディスクの製造方法
JPH05314468A (ja) 磁気記録媒体とその製造方法
JPH0447527A (ja) 磁気記録媒体の製造方法
JPH05174356A (ja) 磁気記録媒体
JPH01227224A (ja) スパッタ磁気ディスク媒体製造用ターゲット及びスパッタ磁気ディスク媒体の製造方法
JPS5891533A (ja) 磁気記録媒体の製造方法
JPS592232A (ja) 磁気記録媒体の製造法
JPS6280826A (ja) 磁気デイスク
JPS63121127A (ja) 磁気デイスク製造用スパツタリング装置
JPH11161934A (ja) 垂直磁気記録媒体及びその製造方法及びそれを使用した記憶装置
JPH11161952A (ja) 磁気記録媒体の製造方法