JPH0522294B2 - - Google Patents

Info

Publication number
JPH0522294B2
JPH0522294B2 JP26711586A JP26711586A JPH0522294B2 JP H0522294 B2 JPH0522294 B2 JP H0522294B2 JP 26711586 A JP26711586 A JP 26711586A JP 26711586 A JP26711586 A JP 26711586A JP H0522294 B2 JPH0522294 B2 JP H0522294B2
Authority
JP
Japan
Prior art keywords
substrate holder
substrate
sputtering
layer
magnetic
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP26711586A
Other languages
English (en)
Japanese (ja)
Other versions
JPS63121128A (ja
Inventor
Nobuyuki Takahashi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fuji Electric Co Ltd
Original Assignee
Fuji Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fuji Electric Co Ltd filed Critical Fuji Electric Co Ltd
Priority to JP26711586A priority Critical patent/JPS63121128A/ja
Publication of JPS63121128A publication Critical patent/JPS63121128A/ja
Publication of JPH0522294B2 publication Critical patent/JPH0522294B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
  • Manufacturing Of Magnetic Record Carriers (AREA)
  • Thin Magnetic Films (AREA)
JP26711586A 1986-11-10 1986-11-10 磁気記録媒体の製造方法 Granted JPS63121128A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP26711586A JPS63121128A (ja) 1986-11-10 1986-11-10 磁気記録媒体の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP26711586A JPS63121128A (ja) 1986-11-10 1986-11-10 磁気記録媒体の製造方法

Publications (2)

Publication Number Publication Date
JPS63121128A JPS63121128A (ja) 1988-05-25
JPH0522294B2 true JPH0522294B2 (enrdf_load_stackoverflow) 1993-03-29

Family

ID=17440272

Family Applications (1)

Application Number Title Priority Date Filing Date
JP26711586A Granted JPS63121128A (ja) 1986-11-10 1986-11-10 磁気記録媒体の製造方法

Country Status (1)

Country Link
JP (1) JPS63121128A (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPS63121128A (ja) 1988-05-25

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