JPS6311784B2 - - Google Patents

Info

Publication number
JPS6311784B2
JPS6311784B2 JP58136921A JP13692183A JPS6311784B2 JP S6311784 B2 JPS6311784 B2 JP S6311784B2 JP 58136921 A JP58136921 A JP 58136921A JP 13692183 A JP13692183 A JP 13692183A JP S6311784 B2 JPS6311784 B2 JP S6311784B2
Authority
JP
Japan
Prior art keywords
floating gate
region
gate
channel region
regions
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP58136921A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5943577A (ja
Inventor
Keshitobodo Parubitsutsu
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Koninklijke Philips NV
Original Assignee
Koninklijke Philips Electronics NV
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Koninklijke Philips Electronics NV filed Critical Koninklijke Philips Electronics NV
Publication of JPS5943577A publication Critical patent/JPS5943577A/ja
Publication of JPS6311784B2 publication Critical patent/JPS6311784B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11C—STATIC STORES
    • G11C16/00—Erasable programmable read-only memories
    • G11C16/02—Erasable programmable read-only memories electrically programmable
    • G11C16/04—Erasable programmable read-only memories electrically programmable using variable threshold transistors, e.g. FAMOS
    • G11C16/0408—Erasable programmable read-only memories electrically programmable using variable threshold transistors, e.g. FAMOS comprising cells containing floating gate transistors
    • G11C16/0441—Erasable programmable read-only memories electrically programmable using variable threshold transistors, e.g. FAMOS comprising cells containing floating gate transistors comprising cells containing multiple floating gate devices, e.g. separate read-and-write FAMOS transistors with connected floating gates
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
    • H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
    • H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
    • H01L29/76—Unipolar devices, e.g. field effect transistors
    • H01L29/772—Field effect transistors
    • H01L29/78—Field effect transistors with field effect produced by an insulated gate
    • H01L29/788—Field effect transistors with field effect produced by an insulated gate with floating gate
    • H01L29/7881—Programmable transistors with only two possible levels of programmation
    • H01L29/7883—Programmable transistors with only two possible levels of programmation charging by tunnelling of carriers, e.g. Fowler-Nordheim tunnelling
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10B—ELECTRONIC MEMORY DEVICES
    • H10B69/00—Erasable-and-programmable ROM [EPROM] devices not provided for in groups H10B41/00 - H10B63/00, e.g. ultraviolet erasable-and-programmable ROM [UVEPROM] devices

Landscapes

  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Ceramic Engineering (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Non-Volatile Memory (AREA)
  • Semiconductor Memories (AREA)
JP58136921A 1982-07-30 1983-07-28 メモリ装置 Granted JPS5943577A (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US403694 1982-07-30
US06/403,694 US4608585A (en) 1982-07-30 1982-07-30 Electrically erasable PROM cell

Publications (2)

Publication Number Publication Date
JPS5943577A JPS5943577A (ja) 1984-03-10
JPS6311784B2 true JPS6311784B2 (US20080094685A1-20080424-C00004.png) 1988-03-16

Family

ID=23596673

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58136921A Granted JPS5943577A (ja) 1982-07-30 1983-07-28 メモリ装置

Country Status (5)

Country Link
US (1) US4608585A (US20080094685A1-20080424-C00004.png)
EP (1) EP0100572B1 (US20080094685A1-20080424-C00004.png)
JP (1) JPS5943577A (US20080094685A1-20080424-C00004.png)
DE (1) DE3379301D1 (US20080094685A1-20080424-C00004.png)
IE (1) IE55287B1 (US20080094685A1-20080424-C00004.png)

Families Citing this family (26)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4654683A (en) * 1985-08-23 1987-03-31 Eastman Kodak Company Blooming control in CCD image sensors
JPS6253463A (ja) * 1985-09-02 1987-03-09 東海工業ミシン株式会社 多頭型刺しゅう縫ミシン
US4736342A (en) * 1985-11-15 1988-04-05 Texas Instruments Incorporated Method of forming a field plate in a high voltage array
US4757359A (en) * 1986-04-07 1988-07-12 American Microsystems, Inc. Thin oxide fuse
IT1191566B (it) * 1986-06-27 1988-03-23 Sgs Microelettronica Spa Dispositivo di memoria non labile a semiconduttore del tipo a porta non connessa (floating gate) alterabile elettricamente con area di tunnel ridotta e procedimento di fabbricazione
IT1201834B (it) * 1986-07-10 1989-02-02 Sgs Microelettronica Spa Dispositivo di memoria non volatile a semiconduttore
US5020030A (en) * 1988-10-31 1991-05-28 Huber Robert J Nonvolatile SNOS memory cell with induced capacitor
US5081054A (en) * 1989-04-03 1992-01-14 Atmel Corporation Fabrication process for programmable and erasable MOS memory device
US5066992A (en) * 1989-06-23 1991-11-19 Atmel Corporation Programmable and erasable MOS memory device
US5014098A (en) * 1990-02-26 1991-05-07 Delco Electronic Corporation CMOS integrated circuit with EEPROM and method of manufacture
US5153143A (en) * 1990-02-26 1992-10-06 Delco Electronics Corporation Method of manufacturing CMOS integrated circuit with EEPROM
KR930006954A (ko) * 1991-09-25 1993-04-22 리차드 데이비드 로만 개선된 지속 특성을 갖는 전기적 소거가능 프로그램 가능 판독 전용 메모리(eeprom)
US5396459A (en) * 1992-02-24 1995-03-07 Sony Corporation Single transistor flash electrically programmable memory cell in which a negative voltage is applied to the nonselected word line
JPH0669515A (ja) * 1992-08-19 1994-03-11 Fujitsu Ltd 半導体記憶装置
JPH07169861A (ja) * 1993-12-14 1995-07-04 Nec Corp 不揮発性半導体記憶装置
TW332344B (en) * 1997-02-27 1998-05-21 Philips Electronics Nv Semiconductor device with a programmable semiconductor element
WO1998038682A1 (en) * 1997-02-27 1998-09-03 Koninklijke Philips Electronics N.V. Semiconductor device with a programmable semiconductor element
US6048738A (en) * 1997-03-07 2000-04-11 Sharp Laboratories Of America, Inc. Method of making ferroelectric memory cell for VLSI RAM array
EP1058299A1 (en) * 1999-06-04 2000-12-06 STMicroelectronics S.r.l. Process for manufacturing electronic devices comprising nonvolatile memory cells with dimensional control of the floating gate regions
DE19929618B4 (de) * 1999-06-28 2006-07-13 Infineon Technologies Ag Verfahren zur Herstellung einer nichtflüchtigen Halbleiter-Speicherzelle mit separatem Tunnelfenster
US6232630B1 (en) * 1999-07-07 2001-05-15 Advanced Micro Devices, Inc. Light floating gate doping to improve tunnel oxide reliability
EP1071134A1 (en) * 1999-07-22 2001-01-24 STMicroelectronics S.r.l. Process for manufacturing an electronic device comprising EEPROM memory cells with dimensional control of the floating gate regions
US6518110B2 (en) * 2000-09-01 2003-02-11 Wen Ying Wen Method of fabricating memory cell structure of flash memory having annular floating gate
JP2004200553A (ja) * 2002-12-20 2004-07-15 Fujitsu Ltd 半導体装置及びその製造方法
US7456465B2 (en) * 2005-09-30 2008-11-25 Freescale Semiconductor, Inc. Split gate memory cell and method therefor
US8670278B1 (en) * 2009-03-27 2014-03-11 Cypress Semiconductor Corporation Method and apparatus for extending the lifetime of a non-volatile trapped-charge memory

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3634929A (en) * 1968-11-02 1972-01-18 Tokyo Shibaura Electric Co Method of manufacturing semiconductor integrated circuits
GB1311178A (en) * 1970-09-19 1973-03-21 Ferranti Ltd Semiconductor devices
US4087795A (en) * 1974-09-20 1978-05-02 Siemens Aktiengesellschaft Memory field effect storage device
US4150389A (en) * 1976-09-29 1979-04-17 Siemens Aktiengesellschaft N-channel memory field effect transistor
DE2743422A1 (de) * 1977-09-27 1979-03-29 Siemens Ag Wortweise loeschbarer, nicht fluechtiger speicher in floating-gate-technik
NL7713051A (nl) * 1977-11-28 1979-05-30 Philips Nv Halfgeleiderinrichting met een permanent geheu- gen en werkwijze ter vervaardiging van een der- gelijke halfgeleiderinrichting.
NL7801532A (nl) * 1978-02-10 1979-08-14 Philips Nv Halfgeleiderinrichting.
US4203158A (en) * 1978-02-24 1980-05-13 Intel Corporation Electrically programmable and erasable MOS floating gate memory device employing tunneling and method of fabricating same
US4467452A (en) * 1981-02-12 1984-08-21 Tokyo Shibaura Denki Kabushiki Kaisha Nonvolatile semiconductor memory device and method of fabricating the same

Also Published As

Publication number Publication date
IE55287B1 (en) 1990-08-01
JPS5943577A (ja) 1984-03-10
EP0100572A3 (en) 1986-02-19
DE3379301D1 (en) 1989-04-06
IE831802L (en) 1984-01-30
EP0100572B1 (en) 1989-03-01
US4608585A (en) 1986-08-26
EP0100572A2 (en) 1984-02-15

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