JPS6311726Y2 - - Google Patents

Info

Publication number
JPS6311726Y2
JPS6311726Y2 JP13898183U JP13898183U JPS6311726Y2 JP S6311726 Y2 JPS6311726 Y2 JP S6311726Y2 JP 13898183 U JP13898183 U JP 13898183U JP 13898183 U JP13898183 U JP 13898183U JP S6311726 Y2 JPS6311726 Y2 JP S6311726Y2
Authority
JP
Japan
Prior art keywords
rotation
chuck
cassette
gear
driven gear
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP13898183U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6045498U (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP13898183U priority Critical patent/JPS6045498U/ja
Publication of JPS6045498U publication Critical patent/JPS6045498U/ja
Application granted granted Critical
Publication of JPS6311726Y2 publication Critical patent/JPS6311726Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Warehouses Or Storage Devices (AREA)
  • Sheets, Magazines, And Separation Thereof (AREA)
JP13898183U 1983-09-05 1983-09-05 カセツトチヤツク装置 Granted JPS6045498U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13898183U JPS6045498U (ja) 1983-09-05 1983-09-05 カセツトチヤツク装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13898183U JPS6045498U (ja) 1983-09-05 1983-09-05 カセツトチヤツク装置

Publications (2)

Publication Number Publication Date
JPS6045498U JPS6045498U (ja) 1985-03-30
JPS6311726Y2 true JPS6311726Y2 (enEXAMPLES) 1988-04-05

Family

ID=30311661

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13898183U Granted JPS6045498U (ja) 1983-09-05 1983-09-05 カセツトチヤツク装置

Country Status (1)

Country Link
JP (1) JPS6045498U (enEXAMPLES)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2648876B2 (ja) * 1987-10-12 1997-09-03 東京エレクトロン株式会社 ウエハキャリア搬送用チャック

Also Published As

Publication number Publication date
JPS6045498U (ja) 1985-03-30

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