JPS63115746U - - Google Patents
Info
- Publication number
- JPS63115746U JPS63115746U JP836287U JP836287U JPS63115746U JP S63115746 U JPS63115746 U JP S63115746U JP 836287 U JP836287 U JP 836287U JP 836287 U JP836287 U JP 836287U JP S63115746 U JPS63115746 U JP S63115746U
- Authority
- JP
- Japan
- Prior art keywords
- light
- inspected
- projector
- inclined surface
- directed
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000007689 inspection Methods 0.000 claims description 5
- 230000000903 blocking effect Effects 0.000 claims 2
- 230000007547 defect Effects 0.000 claims 1
- 230000001678 irradiating effect Effects 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
Landscapes
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
- Optical Measuring Cells (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP836287U JPS63115746U (lt) | 1987-01-23 | 1987-01-23 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP836287U JPS63115746U (lt) | 1987-01-23 | 1987-01-23 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63115746U true JPS63115746U (lt) | 1988-07-26 |
Family
ID=30792667
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP836287U Pending JPS63115746U (lt) | 1987-01-23 | 1987-01-23 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63115746U (lt) |
-
1987
- 1987-01-23 JP JP836287U patent/JPS63115746U/ja active Pending
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