JPH03130545U - - Google Patents
Info
- Publication number
- JPH03130545U JPH03130545U JP4030190U JP4030190U JPH03130545U JP H03130545 U JPH03130545 U JP H03130545U JP 4030190 U JP4030190 U JP 4030190U JP 4030190 U JP4030190 U JP 4030190U JP H03130545 U JPH03130545 U JP H03130545U
- Authority
- JP
- Japan
- Prior art keywords
- inspected
- air purge
- light
- electrical signal
- scanning
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010926 purge Methods 0.000 claims description 6
- 230000007547 defect Effects 0.000 claims description 3
- 230000003287 optical effect Effects 0.000 claims description 3
- 239000000428 dust Substances 0.000 claims 1
- 238000007689 inspection Methods 0.000 claims 1
- 238000000034 method Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 3
Landscapes
- Length Measuring Devices By Optical Means (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4030190U JPH03130545U (lt) | 1990-04-16 | 1990-04-16 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4030190U JPH03130545U (lt) | 1990-04-16 | 1990-04-16 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH03130545U true JPH03130545U (lt) | 1991-12-27 |
Family
ID=31549972
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4030190U Pending JPH03130545U (lt) | 1990-04-16 | 1990-04-16 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH03130545U (lt) |
-
1990
- 1990-04-16 JP JP4030190U patent/JPH03130545U/ja active Pending
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