JPS63112333U - - Google Patents
Info
- Publication number
- JPS63112333U JPS63112333U JP308687U JP308687U JPS63112333U JP S63112333 U JPS63112333 U JP S63112333U JP 308687 U JP308687 U JP 308687U JP 308687 U JP308687 U JP 308687U JP S63112333 U JPS63112333 U JP S63112333U
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- sputtering apparatus
- etching
- valve
- load lock
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 5
- 238000005530 etching Methods 0.000 claims description 3
- 238000004544 sputter deposition Methods 0.000 claims 2
- 239000002184 metal Substances 0.000 claims 1
- 239000004065 semiconductor Substances 0.000 claims 1
- 239000010409 thin film Substances 0.000 claims 1
- 238000005192 partition Methods 0.000 description 3
- 238000000137 annealing Methods 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
Landscapes
- Electrodes Of Semiconductors (AREA)
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP308687U JPS63112333U (enExample) | 1987-01-12 | 1987-01-12 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP308687U JPS63112333U (enExample) | 1987-01-12 | 1987-01-12 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63112333U true JPS63112333U (enExample) | 1988-07-19 |
Family
ID=30782523
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP308687U Pending JPS63112333U (enExample) | 1987-01-12 | 1987-01-12 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63112333U (enExample) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6130030A (ja) * | 1984-07-12 | 1986-02-12 | インタ−ナショナル ビジネス マシ−ンズ コ−ポレ−ション | 多元素半導体のアニ−ル方法 |
-
1987
- 1987-01-12 JP JP308687U patent/JPS63112333U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6130030A (ja) * | 1984-07-12 | 1986-02-12 | インタ−ナショナル ビジネス マシ−ンズ コ−ポレ−ション | 多元素半導体のアニ−ル方法 |
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