JPS63111931U - - Google Patents

Info

Publication number
JPS63111931U
JPS63111931U JP8587U JP8587U JPS63111931U JP S63111931 U JPS63111931 U JP S63111931U JP 8587 U JP8587 U JP 8587U JP 8587 U JP8587 U JP 8587U JP S63111931 U JPS63111931 U JP S63111931U
Authority
JP
Japan
Prior art keywords
optical unit
light
unit
light irradiation
processing device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP8587U
Other languages
English (en)
Japanese (ja)
Other versions
JPH053214Y2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP8587U priority Critical patent/JPH053214Y2/ja
Publication of JPS63111931U publication Critical patent/JPS63111931U/ja
Application granted granted Critical
Publication of JPH053214Y2 publication Critical patent/JPH053214Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Supply, Installation And Extraction Of Printed Sheets Or Plates (AREA)
  • Drying Of Solid Materials (AREA)
  • Printing Methods (AREA)
  • Application Of Or Painting With Fluid Materials (AREA)
  • Coating Apparatus (AREA)
  • Heating, Cooling, Or Curing Plastics Or The Like In General (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
JP8587U 1987-01-06 1987-01-06 Expired - Lifetime JPH053214Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8587U JPH053214Y2 (enrdf_load_stackoverflow) 1987-01-06 1987-01-06

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8587U JPH053214Y2 (enrdf_load_stackoverflow) 1987-01-06 1987-01-06

Publications (2)

Publication Number Publication Date
JPS63111931U true JPS63111931U (enrdf_load_stackoverflow) 1988-07-19
JPH053214Y2 JPH053214Y2 (enrdf_load_stackoverflow) 1993-01-26

Family

ID=30776755

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8587U Expired - Lifetime JPH053214Y2 (enrdf_load_stackoverflow) 1987-01-06 1987-01-06

Country Status (1)

Country Link
JP (1) JPH053214Y2 (enrdf_load_stackoverflow)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03165023A (ja) * 1989-11-24 1991-07-17 Ushio Inc 露光装置
JPH03211556A (ja) * 1990-01-17 1991-09-17 Ushio Inc 光学ユニット
JP2006313862A (ja) * 2005-05-09 2006-11-16 Tokyo Electron Ltd 周縁露光装置、塗布、現像装置及び周縁露光方法

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03165023A (ja) * 1989-11-24 1991-07-17 Ushio Inc 露光装置
JPH03211556A (ja) * 1990-01-17 1991-09-17 Ushio Inc 光学ユニット
JP2006313862A (ja) * 2005-05-09 2006-11-16 Tokyo Electron Ltd 周縁露光装置、塗布、現像装置及び周縁露光方法

Also Published As

Publication number Publication date
JPH053214Y2 (enrdf_load_stackoverflow) 1993-01-26

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