JPS63111931U - - Google Patents
Info
- Publication number
- JPS63111931U JPS63111931U JP8587U JP8587U JPS63111931U JP S63111931 U JPS63111931 U JP S63111931U JP 8587 U JP8587 U JP 8587U JP 8587 U JP8587 U JP 8587U JP S63111931 U JPS63111931 U JP S63111931U
- Authority
- JP
- Japan
- Prior art keywords
- optical unit
- light
- unit
- light irradiation
- processing device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000003287 optical effect Effects 0.000 claims description 11
- 238000010891 electric arc Methods 0.000 claims 1
- 239000000835 fiber Substances 0.000 claims 1
- 239000013307 optical fiber Substances 0.000 description 1
Landscapes
- Printing Methods (AREA)
- Coating Apparatus (AREA)
- Heating, Cooling, Or Curing Plastics Or The Like In General (AREA)
- Supply, Installation And Extraction Of Printed Sheets Or Plates (AREA)
- Drying Of Solid Materials (AREA)
- Application Of Or Painting With Fluid Materials (AREA)
- Physical Or Chemical Processes And Apparatus (AREA)
Description
第１図はこの考案の光処理装置の一実施例の主
要部の概略を示す側断面図、第２図はこの考案の
他の実施例の主要部の概略を示す断面図、第３図
は従来の光処理装置の側断面図である。
図中、１：放電灯、２：楕円集光鏡、３：反射
ミラー、６：灯体、７ａ，７ｂ：ユニツト接合部
、８：ネジ、９：レンズ、１２：光学ユニツト、
１３：被照射物、１４：光フアイバのユニツト、
１５：インテグレータレンズ、１６：コリメータ
レンズ。
FIG. 1 is a side cross-sectional view schematically showing the main parts of one embodiment of the optical processing device of this invention, FIG. 2 is a cross-sectional view schematically showing the main parts of another embodiment of the invention, and FIG. FIG. 2 is a side sectional view of a conventional optical processing device. In the figure, 1: discharge lamp, 2: elliptical collector mirror, 3: reflective mirror, 6: lamp body, 7a, 7b: unit joint, 8: screw, 9: lens, 12: optical unit,
13: irradiated object, 14: optical fiber unit,
15: Integrator lens, 16: Collimator lens.
Claims (1)
のアークが第１焦点の位置となるように配置され
た楕円集光鏡、もしくはこの楕円集光鏡及び楕円
集光鏡からの光束を反射させる反射ミラーとをそ
れぞれ収納した灯体を具備し、この灯体の外壁側
部に、被照射物に対して最適に光照射する複数種
の光照射光学ユニツトを取付け自在にした構造の
ユニツト接合部を設け、かつそれぞれの光照射光
学ユニツトはユニツト接合部に対して同一の係合
構造を具えてなることを特徴とする光処理装置。 (2) 複数種の光照射光学ユニツトは少くとも１
本のフアイバを用いた光学ユニツトと、レンズ系
を組合わせた光学ユニツトと、インテグレータと
レンズ系の組合わせた光学ユニツトの３つのうち
、いずれか１つの光学ユニツトであることを特徴
とする実用新案登録請求の範囲第(1)項記載の光
処理装置。[Claims for Utility Model Registration] (1) A short-arc discharge lamp and an elliptical condenser arranged so that the arc of the discharge lamp is at the first focal point, or the elliptical condenser and the elliptical condenser. It is equipped with a lamp body each housing a reflecting mirror that reflects the light beam from the light mirror, and multiple types of light irradiation optical units are attached to the outer wall side of the lamp body to optimally irradiate light onto the irradiated object. What is claimed is: 1. A light processing device characterized in that a unit joint part having a flexible structure is provided, and each light irradiation optical unit has the same engagement structure with respect to the unit joint part. (2) At least one light irradiation optical unit of multiple types
A utility model characterized in that the optical unit is any one of three types: an optical unit using a real fiber, an optical unit combining a lens system, and an optical unit combining an integrator and a lens system. An optical processing device according to registered claim (1).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8587U JPH053214Y2 (en) | 1987-01-06 | 1987-01-06 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8587U JPH053214Y2 (en) | 1987-01-06 | 1987-01-06 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63111931U true JPS63111931U (en) | 1988-07-19 |
| JPH053214Y2 JPH053214Y2 (en) | 1993-01-26 |
Family
ID=30776755
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8587U Expired - Lifetime JPH053214Y2 (en) | 1987-01-06 | 1987-01-06 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH053214Y2 (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH03165023A (en) * | 1989-11-24 | 1991-07-17 | Ushio Inc | Exposure apparatus |
| JPH03211556A (en) * | 1990-01-17 | 1991-09-17 | Ushio Inc | Optical unit and light irradiation device |
| JP2006313862A (en) * | 2005-05-09 | 2006-11-16 | Tokyo Electron Ltd | Periphery exposure device, application, developer and periphery exposing method |
-
1987
- 1987-01-06 JP JP8587U patent/JPH053214Y2/ja not_active Expired - Lifetime
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH03165023A (en) * | 1989-11-24 | 1991-07-17 | Ushio Inc | Exposure apparatus |
| JPH03211556A (en) * | 1990-01-17 | 1991-09-17 | Ushio Inc | Optical unit and light irradiation device |
| JP2006313862A (en) * | 2005-05-09 | 2006-11-16 | Tokyo Electron Ltd | Periphery exposure device, application, developer and periphery exposing method |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH053214Y2 (en) | 1993-01-26 |
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