JPS63108212A - 座標測定装置の測定アームにスイツチング形の複数個の走査ヘツドを同時に接続する装置 - Google Patents

座標測定装置の測定アームにスイツチング形の複数個の走査ヘツドを同時に接続する装置

Info

Publication number
JPS63108212A
JPS63108212A JP62254819A JP25481987A JPS63108212A JP S63108212 A JPS63108212 A JP S63108212A JP 62254819 A JP62254819 A JP 62254819A JP 25481987 A JP25481987 A JP 25481987A JP S63108212 A JPS63108212 A JP S63108212A
Authority
JP
Japan
Prior art keywords
scanning
contact
heads
switching
head
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP62254819A
Other languages
English (en)
Japanese (ja)
Inventor
カール−オイゲン・アウベレ
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Carl Zeiss SMT GmbH
Carl Zeiss AG
Original Assignee
Carl Zeiss SMT GmbH
Carl Zeiss AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Carl Zeiss SMT GmbH, Carl Zeiss AG filed Critical Carl Zeiss SMT GmbH
Publication of JPS63108212A publication Critical patent/JPS63108212A/ja
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
    • G01B7/004—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring coordinates of points
    • G01B7/008—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring coordinates of points using coordinate measuring machines
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
    • G01B7/004—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring coordinates of points
    • G01B7/008—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring coordinates of points using coordinate measuring machines
    • G01B7/012—Contact-making feeler heads therefor

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
  • A Measuring Device Byusing Mechanical Method (AREA)
JP62254819A 1986-10-11 1987-10-12 座標測定装置の測定アームにスイツチング形の複数個の走査ヘツドを同時に接続する装置 Pending JPS63108212A (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE19863634689 DE3634689A1 (de) 1986-10-11 1986-10-11 Anordnung fuer den gleichzeitigen anschluss mehrerer tastkoepfe vom schaltenden typ an den messarm eines koordinatenmessgeraetes
DE3634689.6 1986-10-11

Publications (1)

Publication Number Publication Date
JPS63108212A true JPS63108212A (ja) 1988-05-13

Family

ID=6311543

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62254819A Pending JPS63108212A (ja) 1986-10-11 1987-10-12 座標測定装置の測定アームにスイツチング形の複数個の走査ヘツドを同時に接続する装置

Country Status (4)

Country Link
US (1) US4785545A (enExample)
JP (1) JPS63108212A (enExample)
DE (1) DE3634689A1 (enExample)
GB (1) GB2197482B (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012137498A (ja) * 2004-12-16 2012-07-19 Werth Messtechnik Gmbh 座標測定装置ならびに座標測定装置を用いて加工物の幾何形状を測定する方法

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE8700885U1 (de) * 1987-01-20 1987-03-05 Fa. Carl Zeiss, 7920 Heidenheim Tastkopf für Koordinatenmeßgeräte
DE3728578A1 (de) * 1987-08-27 1989-03-09 Zeiss Carl Fa Tastsystem fuer koordinatenmessgeraete
DE3831975A1 (de) * 1988-04-12 1989-10-26 Wegu Messtechnik Piezogesteuerter dynamischer tastkopf
FR2673468A1 (fr) * 1991-02-28 1992-09-04 Renishaw Plc Circuit de conditionnement de signaux pour sonde a declenchement.
DE4327288A1 (de) * 1993-08-13 1995-02-16 Siemens Ag Längenprüfeinrichtung
US5822877A (en) * 1996-06-20 1998-10-20 Brown & Sharpe Manufacturing Company Multi-probe system for dimensional metrology
JP3647378B2 (ja) * 2001-03-02 2005-05-11 キヤノン株式会社 マルチプローブを用いた形状測定装置及び測定方法
US8711365B2 (en) 2004-12-16 2014-04-29 Werth Messtechnik Gmbh Coordinate measuring device and method for measuring with a coordinate measuring device
GB201417164D0 (en) 2014-09-29 2014-11-12 Renishaw Plc Measurement Probe
GB201417162D0 (en) 2014-09-29 2014-11-12 Renishaw Plc Inspection appartus

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5313451A (en) * 1976-06-09 1978-02-07 Dea Spa Tracer apparatus

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1445977A (en) * 1972-09-21 1976-08-11 Rolls Royce Probes
GB1551218A (en) * 1975-05-13 1979-08-22 Rolls Royce Probe for use in displacement measuring apparatus
US4136458A (en) * 1976-10-01 1979-01-30 The Bendix Corporation Bi-axial probe
DE2712181C3 (de) * 1977-03-19 1981-01-22 Fa. Carl Zeiss, 7920 Heidenheim Tastsystem
DE2947394A1 (de) * 1979-11-24 1981-05-27 Ernst Leitz Wetzlar Gmbh, 6330 Wetzlar Einrichtung zur messwerterfassung an prueflingen
US4608763A (en) * 1983-06-14 1986-09-02 Gte Valeron Corporation Probe

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5313451A (en) * 1976-06-09 1978-02-07 Dea Spa Tracer apparatus

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012137498A (ja) * 2004-12-16 2012-07-19 Werth Messtechnik Gmbh 座標測定装置ならびに座標測定装置を用いて加工物の幾何形状を測定する方法

Also Published As

Publication number Publication date
DE3634689C2 (enExample) 1991-08-14
US4785545A (en) 1988-11-22
DE3634689A1 (de) 1988-04-14
GB2197482A (en) 1988-05-18
GB8723286D0 (en) 1987-11-11
GB2197482B (en) 1990-09-19

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