JPS63101588A - 電歪素子を用いたアクチュエータの組立方法 - Google Patents

電歪素子を用いたアクチュエータの組立方法

Info

Publication number
JPS63101588A
JPS63101588A JP24435686A JP24435686A JPS63101588A JP S63101588 A JPS63101588 A JP S63101588A JP 24435686 A JP24435686 A JP 24435686A JP 24435686 A JP24435686 A JP 24435686A JP S63101588 A JPS63101588 A JP S63101588A
Authority
JP
Japan
Prior art keywords
electrostrictive element
main body
support member
actuator
valve body
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP24435686A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0356343B2 (enExample
Inventor
Tomohiko Katagiri
朝彦 片桐
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
KOGANEI SEISAKUSHO KK
Koganei Corp
Original Assignee
KOGANEI SEISAKUSHO KK
Koganei Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by KOGANEI SEISAKUSHO KK, Koganei Corp filed Critical KOGANEI SEISAKUSHO KK
Priority to JP24435686A priority Critical patent/JPS63101588A/ja
Publication of JPS63101588A publication Critical patent/JPS63101588A/ja
Publication of JPH0356343B2 publication Critical patent/JPH0356343B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Electrically Driven Valve-Operating Means (AREA)
JP24435686A 1986-10-15 1986-10-15 電歪素子を用いたアクチュエータの組立方法 Granted JPS63101588A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP24435686A JPS63101588A (ja) 1986-10-15 1986-10-15 電歪素子を用いたアクチュエータの組立方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP24435686A JPS63101588A (ja) 1986-10-15 1986-10-15 電歪素子を用いたアクチュエータの組立方法

Publications (2)

Publication Number Publication Date
JPS63101588A true JPS63101588A (ja) 1988-05-06
JPH0356343B2 JPH0356343B2 (enExample) 1991-08-28

Family

ID=17117479

Family Applications (1)

Application Number Title Priority Date Filing Date
JP24435686A Granted JPS63101588A (ja) 1986-10-15 1986-10-15 電歪素子を用いたアクチュエータの組立方法

Country Status (1)

Country Link
JP (1) JPS63101588A (enExample)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5318271A (en) * 1991-12-11 1994-06-07 Hoerbiger Ventilwerke Aktiengessellschaft Piezo valve
US5669416A (en) * 1993-06-18 1997-09-23 Siemens Aktiengesellschaft Servo-valve
EP1158182A1 (de) * 2000-05-25 2001-11-28 FESTO AG & Co Ventileinrichtung
JP2006250221A (ja) * 2005-03-10 2006-09-21 Daishin:Kk 流路切替ユニット、吸着保持ユニット、及び、気圧作動ユニット
KR101301487B1 (ko) * 2011-06-07 2013-08-29 경원산업 주식회사 압전 밸브

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5318271A (en) * 1991-12-11 1994-06-07 Hoerbiger Ventilwerke Aktiengessellschaft Piezo valve
US5669416A (en) * 1993-06-18 1997-09-23 Siemens Aktiengesellschaft Servo-valve
EP1158182A1 (de) * 2000-05-25 2001-11-28 FESTO AG & Co Ventileinrichtung
JP2006250221A (ja) * 2005-03-10 2006-09-21 Daishin:Kk 流路切替ユニット、吸着保持ユニット、及び、気圧作動ユニット
KR101301487B1 (ko) * 2011-06-07 2013-08-29 경원산업 주식회사 압전 밸브

Also Published As

Publication number Publication date
JPH0356343B2 (enExample) 1991-08-28

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