JPS629713Y2 - - Google Patents
Info
- Publication number
- JPS629713Y2 JPS629713Y2 JP15621080U JP15621080U JPS629713Y2 JP S629713 Y2 JPS629713 Y2 JP S629713Y2 JP 15621080 U JP15621080 U JP 15621080U JP 15621080 U JP15621080 U JP 15621080U JP S629713 Y2 JPS629713 Y2 JP S629713Y2
- Authority
- JP
- Japan
- Prior art keywords
- alignment mark
- stripes
- alignment
- scanning
- area
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 230000007423 decrease Effects 0.000 claims description 3
- 238000010894 electron beam technology Methods 0.000 description 8
- 238000010586 diagram Methods 0.000 description 3
- 238000001514 detection method Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 230000003247 decreasing effect Effects 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
Landscapes
- Electron Beam Exposure (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15621080U JPS629713Y2 (enrdf_load_html_response) | 1980-10-31 | 1980-10-31 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15621080U JPS629713Y2 (enrdf_load_html_response) | 1980-10-31 | 1980-10-31 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5780833U JPS5780833U (enrdf_load_html_response) | 1982-05-19 |
| JPS629713Y2 true JPS629713Y2 (enrdf_load_html_response) | 1987-03-06 |
Family
ID=29515381
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15621080U Expired JPS629713Y2 (enrdf_load_html_response) | 1980-10-31 | 1980-10-31 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS629713Y2 (enrdf_load_html_response) |
-
1980
- 1980-10-31 JP JP15621080U patent/JPS629713Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5780833U (enrdf_load_html_response) | 1982-05-19 |
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