JPS6296844U - - Google Patents
Info
- Publication number
- JPS6296844U JPS6296844U JP18921885U JP18921885U JPS6296844U JP S6296844 U JPS6296844 U JP S6296844U JP 18921885 U JP18921885 U JP 18921885U JP 18921885 U JP18921885 U JP 18921885U JP S6296844 U JPS6296844 U JP S6296844U
- Authority
- JP
- Japan
- Prior art keywords
- electrode
- high frequency
- frequency power
- etched
- dry etching
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001312 dry etching Methods 0.000 claims description 3
- 230000005684 electric field Effects 0.000 claims description 3
- 238000005530 etching Methods 0.000 claims description 3
- 239000004065 semiconductor Substances 0.000 claims description 3
- 230000005856 abnormality Effects 0.000 claims 1
- 238000000034 method Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
Landscapes
- Drying Of Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18921885U JPS6296844U (de) | 1985-12-09 | 1985-12-09 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18921885U JPS6296844U (de) | 1985-12-09 | 1985-12-09 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6296844U true JPS6296844U (de) | 1987-06-20 |
Family
ID=31141310
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18921885U Pending JPS6296844U (de) | 1985-12-09 | 1985-12-09 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6296844U (de) |
-
1985
- 1985-12-09 JP JP18921885U patent/JPS6296844U/ja active Pending