JPH02127029U - - Google Patents
Info
- Publication number
- JPH02127029U JPH02127029U JP3707089U JP3707089U JPH02127029U JP H02127029 U JPH02127029 U JP H02127029U JP 3707089 U JP3707089 U JP 3707089U JP 3707089 U JP3707089 U JP 3707089U JP H02127029 U JPH02127029 U JP H02127029U
- Authority
- JP
- Japan
- Prior art keywords
- wafer table
- power source
- high frequency
- frequency power
- plasma etching
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000001020 plasma etching Methods 0.000 claims description 2
- 239000004065 semiconductor Substances 0.000 description 1
Landscapes
- ing And Chemical Polishing (AREA)
- Drying Of Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1989037070U JPH0741154Y2 (ja) | 1989-03-30 | 1989-03-30 | プラズマエッチング用ウェハーテーブル |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1989037070U JPH0741154Y2 (ja) | 1989-03-30 | 1989-03-30 | プラズマエッチング用ウェハーテーブル |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH02127029U true JPH02127029U (de) | 1990-10-19 |
| JPH0741154Y2 JPH0741154Y2 (ja) | 1995-09-20 |
Family
ID=31543852
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1989037070U Expired - Lifetime JPH0741154Y2 (ja) | 1989-03-30 | 1989-03-30 | プラズマエッチング用ウェハーテーブル |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0741154Y2 (de) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58206125A (ja) * | 1982-05-26 | 1983-12-01 | Hitachi Ltd | プラズマ処理装置 |
| JPS63177520A (ja) * | 1987-01-19 | 1988-07-21 | Matsushita Electric Ind Co Ltd | ドライエッチング方法 |
-
1989
- 1989-03-30 JP JP1989037070U patent/JPH0741154Y2/ja not_active Expired - Lifetime
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58206125A (ja) * | 1982-05-26 | 1983-12-01 | Hitachi Ltd | プラズマ処理装置 |
| JPS63177520A (ja) * | 1987-01-19 | 1988-07-21 | Matsushita Electric Ind Co Ltd | ドライエッチング方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0741154Y2 (ja) | 1995-09-20 |
Similar Documents
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| EXPY | Cancellation because of completion of term |