JPS62152435U - - Google Patents
Info
- Publication number
- JPS62152435U JPS62152435U JP3905486U JP3905486U JPS62152435U JP S62152435 U JPS62152435 U JP S62152435U JP 3905486 U JP3905486 U JP 3905486U JP 3905486 U JP3905486 U JP 3905486U JP S62152435 U JPS62152435 U JP S62152435U
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- electrodes
- dry etching
- etching
- electrode
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000758 substrate Substances 0.000 claims description 5
- 238000001312 dry etching Methods 0.000 claims description 3
- 238000005530 etching Methods 0.000 claims description 3
- 239000000463 material Substances 0.000 claims 1
- 238000000034 method Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Drying Of Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986039054U JPH0451473Y2 (de) | 1986-03-19 | 1986-03-19 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986039054U JPH0451473Y2 (de) | 1986-03-19 | 1986-03-19 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62152435U true JPS62152435U (de) | 1987-09-28 |
| JPH0451473Y2 JPH0451473Y2 (de) | 1992-12-03 |
Family
ID=30851870
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1986039054U Expired JPH0451473Y2 (de) | 1986-03-19 | 1986-03-19 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0451473Y2 (de) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58125831A (ja) * | 1982-01-22 | 1983-07-27 | Seiko Epson Corp | ドライエツチング装置 |
| JPS58168232A (ja) * | 1982-03-30 | 1983-10-04 | Fujitsu Ltd | 平行平板型ドライエツチング装置 |
-
1986
- 1986-03-19 JP JP1986039054U patent/JPH0451473Y2/ja not_active Expired
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58125831A (ja) * | 1982-01-22 | 1983-07-27 | Seiko Epson Corp | ドライエツチング装置 |
| JPS58168232A (ja) * | 1982-03-30 | 1983-10-04 | Fujitsu Ltd | 平行平板型ドライエツチング装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0451473Y2 (de) | 1992-12-03 |