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Mitsubishi Electric Corp
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Mitsubishi Electric Corp
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Priority to JP23457585ApriorityCriticalpatent/JPS6295408A/ja
Publication of JPS6295408ApublicationCriticalpatent/JPS6295408A/ja
Publication of JPH0410966B2publicationCriticalpatent/JPH0410966B2/ja
Apparatus for optically measuring the distance between two grating-like structures and the size of periodic pattern elements forming one of the grating-like structures