JPS6294334U - - Google Patents
Info
- Publication number
- JPS6294334U JPS6294334U JP1985185481U JP18548185U JPS6294334U JP S6294334 U JPS6294334 U JP S6294334U JP 1985185481 U JP1985185481 U JP 1985185481U JP 18548185 U JP18548185 U JP 18548185U JP S6294334 U JPS6294334 U JP S6294334U
- Authority
- JP
- Japan
- Prior art keywords
- mask substrate
- thin film
- glass plate
- utility
- well
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 5
- 239000010409 thin film Substances 0.000 claims description 4
- 239000011521 glass Substances 0.000 claims description 2
- 238000000034 method Methods 0.000 description 2
- 238000005530 etching Methods 0.000 description 1
- 238000012544 monitoring process Methods 0.000 description 1
Description
（図面）、第１図はこの考案のマスク基板の一
実施例を示す斜視図、第２図は上記一実施例のマ
スク基板においてＣｒ薄膜とカセツトとの導通を
とる方法を示す斜視図、第３図は上記一実施例の
マスク基板においてＣｒ薄膜のエツチング状況を
モニターする方法を示す斜視図、第４図は従来の
マスク基板においてＣｒ薄膜とカセツトとの導通
をとる方法を示す斜視図である。
１１…ガラス板、１２ａ，１２ｂ…Ｃｒ薄膜、
１３…マスク基板。
(Drawings), FIG. 1 is a perspective view showing an embodiment of the mask substrate of this invention, FIG. FIG. 3 is a perspective view showing a method for monitoring the etching status of the Cr thin film on the mask substrate of the above-mentioned embodiment, and FIG. 4 is a perspective view showing a method for establishing conduction between the Cr thin film and the cassette in the conventional mask substrate. . 11...Glass plate, 12a, 12b...Cr thin film,
13...Mask substrate.
Claims (1)
することを特徴とするマスク基板。 A mask substrate characterized in that it has a Cr thin film on the side surface as well as the surface of the glass plate.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985185481U JPS6294334U (en) | 1985-12-03 | 1985-12-03 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985185481U JPS6294334U (en) | 1985-12-03 | 1985-12-03 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6294334U true JPS6294334U (en) | 1987-06-16 |
Family
ID=31134147
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1985185481U Pending JPS6294334U (en) | 1985-12-03 | 1985-12-03 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6294334U (en) |
-
1985
- 1985-12-03 JP JP1985185481U patent/JPS6294334U/ja active Pending
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