JPS6430354U - - Google Patents
Info
- Publication number
- JPS6430354U JPS6430354U JP12543787U JP12543787U JPS6430354U JP S6430354 U JPS6430354 U JP S6430354U JP 12543787 U JP12543787 U JP 12543787U JP 12543787 U JP12543787 U JP 12543787U JP S6430354 U JPS6430354 U JP S6430354U
- Authority
- JP
- Japan
- Prior art keywords
- thin film
- shielding plate
- aluminum
- stainless steel
- film layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 6
- 229910052782 aluminium Inorganic materials 0.000 claims description 6
- 239000010409 thin film Substances 0.000 claims description 4
- 229910001220 stainless steel Inorganic materials 0.000 description 5
- 239000010935 stainless steel Substances 0.000 description 5
- 235000012431 wafers Nutrition 0.000 description 3
- 239000002245 particle Substances 0.000 description 2
- 238000010586 diagram Methods 0.000 description 1
- 239000010408 film Substances 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
- Other Surface Treatments For Metallic Materials (AREA)
- Electrodes Of Semiconductors (AREA)
Description
第１図は本考案の一実施例を示す断面図、第２
図は第１図のＡ部拡大図、第３図は従来の遮蔽板
を示す断面図、第４図はアルミニウム製、ステン
レス鋼製、本考案のステンレス鋼板にアルミニウ
ム薄膜を形成した遮蔽板をそれぞれ使用しウエー
ハ処理枚数によるウエーハ表面への付着粒子数（
０．３μｍ以上）の違いを調べた結果を示す図、
第５図はアルミニウム製、ステンレス鋼製、本考
案のステンレス鋼板にアルミニウム薄膜を形成し
た遮蔽板を使用し、ウエーハ表面への付着粒子数
（０．３μｍ以上）の違いを調べた結果を示す図
である。
２……ステンレス鋼板、３……アルミニウム薄
膜層。
Fig. 1 is a sectional view showing one embodiment of the present invention;
The figure is an enlarged view of part A in Figure 1, Figure 3 is a sectional view showing a conventional shielding plate, and Figure 4 is a shielding plate made of aluminum, stainless steel, and the present invention with a thin aluminum film formed on the stainless steel plate. Number of particles attached to the wafer surface depending on the number of wafers used (
A diagram showing the results of investigating the difference (0.3 μm or more),
Figure 5 shows the results of investigating the difference in the number of particles (0.3 μm or more) attached to the wafer surface using shielding plates made of aluminum, stainless steel, and the stainless steel plate of the present invention with an aluminum thin film formed on them. It is. 2... Stainless steel plate, 3... Aluminum thin film layer.
Claims (1)
蔽板本体の表面上にアルミニウム薄膜層を積層し
たことを特徴とする薄膜形成装置の遮蔽板。 1. A shielding plate for a thin film forming apparatus, characterized in that an aluminum thin film layer is laminated on the surface of a main body of the shielding plate.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987125437U JPH06448Y2 (en) | 1987-08-18 | 1987-08-18 | Shield plate for thin film forming equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987125437U JPH06448Y2 (en) | 1987-08-18 | 1987-08-18 | Shield plate for thin film forming equipment |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6430354U true JPS6430354U (en) | 1989-02-23 |
| JPH06448Y2 JPH06448Y2 (en) | 1994-01-05 |
Family
ID=31376044
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987125437U Expired - Lifetime JPH06448Y2 (en) | 1987-08-18 | 1987-08-18 | Shield plate for thin film forming equipment |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH06448Y2 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US11395053B2 (en) | 2018-09-14 | 2022-07-19 | Yamaha Corporation | Speaker housing |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6379958A (en) * | 1986-09-22 | 1988-04-09 | Matsushita Electric Ind Co Ltd | Mask for vapor deposition and its production |
-
1987
- 1987-08-18 JP JP1987125437U patent/JPH06448Y2/en not_active Expired - Lifetime
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6379958A (en) * | 1986-09-22 | 1988-04-09 | Matsushita Electric Ind Co Ltd | Mask for vapor deposition and its production |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US11395053B2 (en) | 2018-09-14 | 2022-07-19 | Yamaha Corporation | Speaker housing |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH06448Y2 (en) | 1994-01-05 |