JPS6288394A - 窒化アルミニウムセラミツク基板の製造方法 - Google Patents

窒化アルミニウムセラミツク基板の製造方法

Info

Publication number
JPS6288394A
JPS6288394A JP60230259A JP23025985A JPS6288394A JP S6288394 A JPS6288394 A JP S6288394A JP 60230259 A JP60230259 A JP 60230259A JP 23025985 A JP23025985 A JP 23025985A JP S6288394 A JPS6288394 A JP S6288394A
Authority
JP
Japan
Prior art keywords
aluminum nitride
metal layer
ceramic substrate
ceramic
metal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP60230259A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0410752B2 (enExample
Inventor
和明 内海
哲彌 逢坂
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp filed Critical NEC Corp
Priority to JP60230259A priority Critical patent/JPS6288394A/ja
Priority to DE8686114283T priority patent/DE3672441D1/de
Priority to EP19860114283 priority patent/EP0219122B1/en
Publication of JPS6288394A publication Critical patent/JPS6288394A/ja
Publication of JPH0410752B2 publication Critical patent/JPH0410752B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Chemically Coating (AREA)
  • Manufacturing Of Printed Wiring (AREA)
JP60230259A 1985-10-15 1985-10-15 窒化アルミニウムセラミツク基板の製造方法 Granted JPS6288394A (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP60230259A JPS6288394A (ja) 1985-10-15 1985-10-15 窒化アルミニウムセラミツク基板の製造方法
DE8686114283T DE3672441D1 (de) 1985-10-15 1986-10-15 Metallisiertes keramiksubstrat und herstellungsverfahren.
EP19860114283 EP0219122B1 (en) 1985-10-15 1986-10-15 Metallized ceramic substrate and method of manufacturing the same

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60230259A JPS6288394A (ja) 1985-10-15 1985-10-15 窒化アルミニウムセラミツク基板の製造方法

Publications (2)

Publication Number Publication Date
JPS6288394A true JPS6288394A (ja) 1987-04-22
JPH0410752B2 JPH0410752B2 (enExample) 1992-02-26

Family

ID=16904997

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60230259A Granted JPS6288394A (ja) 1985-10-15 1985-10-15 窒化アルミニウムセラミツク基板の製造方法

Country Status (1)

Country Link
JP (1) JPS6288394A (enExample)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4959255A (en) * 1987-04-16 1990-09-25 Ngk Insulators, Ltd. Ceramic substrates and method of manufacturing the same
JP2013143471A (ja) * 2012-01-11 2013-07-22 Murata Mfg Co Ltd 電子部品
JP2014232800A (ja) * 2013-05-29 2014-12-11 日本特殊陶業株式会社 サーミスタ素子

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5482666A (en) * 1977-12-15 1979-07-02 Oki Electric Ind Co Ltd Nonnelectrolytic plating method of insulated substrate
JPS61197488A (ja) * 1985-02-26 1986-09-01 ティーディーケイ株式会社 窒化アルミニウム上の銅電極形成法

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5482666A (en) * 1977-12-15 1979-07-02 Oki Electric Ind Co Ltd Nonnelectrolytic plating method of insulated substrate
JPS61197488A (ja) * 1985-02-26 1986-09-01 ティーディーケイ株式会社 窒化アルミニウム上の銅電極形成法

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4959255A (en) * 1987-04-16 1990-09-25 Ngk Insulators, Ltd. Ceramic substrates and method of manufacturing the same
JP2013143471A (ja) * 2012-01-11 2013-07-22 Murata Mfg Co Ltd 電子部品
JP2014232800A (ja) * 2013-05-29 2014-12-11 日本特殊陶業株式会社 サーミスタ素子

Also Published As

Publication number Publication date
JPH0410752B2 (enExample) 1992-02-26

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