JPS6286154A - 溶融物質の蒸気噴出装置 - Google Patents
溶融物質の蒸気噴出装置Info
- Publication number
- JPS6286154A JPS6286154A JP22496085A JP22496085A JPS6286154A JP S6286154 A JPS6286154 A JP S6286154A JP 22496085 A JP22496085 A JP 22496085A JP 22496085 A JP22496085 A JP 22496085A JP S6286154 A JPS6286154 A JP S6286154A
- Authority
- JP
- Japan
- Prior art keywords
- crucible
- molten
- molten material
- vapor
- steam
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000012768 molten material Substances 0.000 title claims abstract description 22
- 238000010438 heat treatment Methods 0.000 claims abstract description 25
- 229910052715 tantalum Inorganic materials 0.000 claims abstract 3
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 claims abstract 3
- 239000000126 substance Substances 0.000 claims description 15
- 239000002184 metal Substances 0.000 claims description 13
- 229910052751 metal Inorganic materials 0.000 claims description 13
- 230000002093 peripheral effect Effects 0.000 claims description 6
- 239000007769 metal material Substances 0.000 claims description 2
- 238000000034 method Methods 0.000 abstract description 3
- 238000001771 vacuum deposition Methods 0.000 abstract 2
- 239000000463 material Substances 0.000 description 5
- 239000010409 thin film Substances 0.000 description 4
- 230000000694 effects Effects 0.000 description 3
- 238000012423 maintenance Methods 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- 238000000427 thin-film deposition Methods 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 230000001133 acceleration Effects 0.000 description 1
- 229910052793 cadmium Inorganic materials 0.000 description 1
- BDOSMKKIYDKNTQ-UHFFFAOYSA-N cadmium atom Chemical compound [Cd] BDOSMKKIYDKNTQ-UHFFFAOYSA-N 0.000 description 1
- 238000009833 condensation Methods 0.000 description 1
- 230000005494 condensation Effects 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 239000006185 dispersion Substances 0.000 description 1
- 238000000605 extraction Methods 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 239000011133 lead Substances 0.000 description 1
- 230000014759 maintenance of location Effects 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- 230000000379 polymerizing effect Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- 230000000087 stabilizing effect Effects 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP22496085A JPS6286154A (ja) | 1985-10-11 | 1985-10-11 | 溶融物質の蒸気噴出装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP22496085A JPS6286154A (ja) | 1985-10-11 | 1985-10-11 | 溶融物質の蒸気噴出装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6286154A true JPS6286154A (ja) | 1987-04-20 |
| JPH0414185B2 JPH0414185B2 (enrdf_load_stackoverflow) | 1992-03-12 |
Family
ID=16821895
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP22496085A Granted JPS6286154A (ja) | 1985-10-11 | 1985-10-11 | 溶融物質の蒸気噴出装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6286154A (enrdf_load_stackoverflow) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR101918328B1 (ko) * | 2014-07-25 | 2018-11-13 | 현대중공업 주식회사 | 엔진의 푸시로드 커버 |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5842159A (ja) * | 1981-09-08 | 1983-03-11 | Mini Pairo Denki:Kk | 片口金型放電ランプ |
-
1985
- 1985-10-11 JP JP22496085A patent/JPS6286154A/ja active Granted
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5842159A (ja) * | 1981-09-08 | 1983-03-11 | Mini Pairo Denki:Kk | 片口金型放電ランプ |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0414185B2 (enrdf_load_stackoverflow) | 1992-03-12 |
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