JPS628438A - 走査電子顕微鏡 - Google Patents

走査電子顕微鏡

Info

Publication number
JPS628438A
JPS628438A JP60147394A JP14739485A JPS628438A JP S628438 A JPS628438 A JP S628438A JP 60147394 A JP60147394 A JP 60147394A JP 14739485 A JP14739485 A JP 14739485A JP S628438 A JPS628438 A JP S628438A
Authority
JP
Japan
Prior art keywords
electrode
working distance
sample
objective lens
detector
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP60147394A
Other languages
English (en)
Japanese (ja)
Other versions
JPH02817B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Inventor
Junichi Ooyama
大山　純一
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Original Assignee
Jeol Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jeol Ltd filed Critical Jeol Ltd
Priority to JP60147394A priority Critical patent/JPS628438A/ja
Publication of JPS628438A publication Critical patent/JPS628438A/ja
Publication of JPH02817B2 publication Critical patent/JPH02817B2/ja
Granted legal-status Critical Current

Links

JP60147394A 1985-07-04 1985-07-04 走査電子顕微鏡 Granted JPS628438A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP60147394A JPS628438A (ja) 1985-07-04 1985-07-04 走査電子顕微鏡

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60147394A JPS628438A (ja) 1985-07-04 1985-07-04 走査電子顕微鏡

Publications (2)

Publication Number Publication Date
JPS628438A true JPS628438A (ja) 1987-01-16
JPH02817B2 JPH02817B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1990-01-09

Family

ID=15429277

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60147394A Granted JPS628438A (ja) 1985-07-04 1985-07-04 走査電子顕微鏡

Country Status (1)

Country Link
JP (1) JPS628438A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10603825B2 (en) 2017-02-03 2020-03-31 Honda Motor Co., Ltd. Fiber-reinforced resin molded article, manufacturing method, and manufacturing apparatus for fiber-reinforced resin molded article

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10603825B2 (en) 2017-02-03 2020-03-31 Honda Motor Co., Ltd. Fiber-reinforced resin molded article, manufacturing method, and manufacturing apparatus for fiber-reinforced resin molded article

Also Published As

Publication number Publication date
JPH02817B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1990-01-09

Similar Documents

Publication Publication Date Title
US20100090109A1 (en) Scanning electron microscope
JPH09171791A (ja) 走査形電子顕微鏡
JP3542140B2 (ja) 投射型イオンビーム加工装置
JP3323021B2 (ja) 走査形電子顕微鏡及びそれを用いた試料像観察方法
JPH0917369A (ja) 走査形電子顕微鏡
JP4292068B2 (ja) 走査電子顕微鏡
JP3341226B2 (ja) 走査電子顕微鏡
JPH10302705A (ja) 走査電子顕微鏡
JP4103345B2 (ja) 荷電粒子線装置
JPH0935679A (ja) 走査電子顕微鏡
JPH08138611A (ja) 荷電粒子線装置
US4918358A (en) Apparatus using charged-particle beam
US7161149B2 (en) Scanning electron microscope and method of controlling same
JPS628438A (ja) 走査電子顕微鏡
JP3244620B2 (ja) 走査電子顕微鏡
JP4256300B2 (ja) 基板検査方法および基板検査装置
JP2002025492A (ja) 静電ミラーを含む荷電粒子ビーム画像化装置用低プロフィル電子検出器を使用して試料を画像化するための方法および装置
US7394069B1 (en) Large-field scanning of charged particles
US6858845B2 (en) Scanning electron microscope
JPH0864163A (ja) 荷電粒子ビーム装置
JP3494152B2 (ja) 走査形電子顕微鏡
JP4179369B2 (ja) 走査形電子顕微鏡
JPH1167137A (ja) 粒子線装置
JPH0236207Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
JP2005005178A (ja) 観察装置及び観察装置の制御方法