JPS628393Y2 - - Google Patents

Info

Publication number
JPS628393Y2
JPS628393Y2 JP5244181U JP5244181U JPS628393Y2 JP S628393 Y2 JPS628393 Y2 JP S628393Y2 JP 5244181 U JP5244181 U JP 5244181U JP 5244181 U JP5244181 U JP 5244181U JP S628393 Y2 JPS628393 Y2 JP S628393Y2
Authority
JP
Japan
Prior art keywords
pump
exhaust pipe
vacuum
sublimation
valve
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP5244181U
Other languages
English (en)
Japanese (ja)
Other versions
JPS57164270U (cs
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP5244181U priority Critical patent/JPS628393Y2/ja
Publication of JPS57164270U publication Critical patent/JPS57164270U/ja
Application granted granted Critical
Publication of JPS628393Y2 publication Critical patent/JPS628393Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
JP5244181U 1981-04-10 1981-04-10 Expired JPS628393Y2 (cs)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5244181U JPS628393Y2 (cs) 1981-04-10 1981-04-10

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5244181U JPS628393Y2 (cs) 1981-04-10 1981-04-10

Publications (2)

Publication Number Publication Date
JPS57164270U JPS57164270U (cs) 1982-10-16
JPS628393Y2 true JPS628393Y2 (cs) 1987-02-26

Family

ID=29849126

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5244181U Expired JPS628393Y2 (cs) 1981-04-10 1981-04-10

Country Status (1)

Country Link
JP (1) JPS628393Y2 (cs)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5016988B2 (ja) * 2007-06-19 2012-09-05 株式会社日立ハイテクノロジーズ 荷電粒子線装置およびその真空立上げ方法
JP6201729B2 (ja) * 2013-12-20 2017-09-27 株式会社豊田中央研究所 熱遷移流ポンプシステム及び熱遷移流ポンプを用いた真空室の真空維持方法

Also Published As

Publication number Publication date
JPS57164270U (cs) 1982-10-16

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