JPS6282560U - - Google Patents

Info

Publication number
JPS6282560U
JPS6282560U JP17453585U JP17453585U JPS6282560U JP S6282560 U JPS6282560 U JP S6282560U JP 17453585 U JP17453585 U JP 17453585U JP 17453585 U JP17453585 U JP 17453585U JP S6282560 U JPS6282560 U JP S6282560U
Authority
JP
Japan
Prior art keywords
deflector
generation circuit
charged particle
alignment
beam blanking
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP17453585U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP17453585U priority Critical patent/JPS6282560U/ja
Publication of JPS6282560U publication Critical patent/JPS6282560U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Electron Sources, Ion Sources (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
JP17453585U 1985-11-12 1985-11-12 Pending JPS6282560U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17453585U JPS6282560U (enrdf_load_stackoverflow) 1985-11-12 1985-11-12

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17453585U JPS6282560U (enrdf_load_stackoverflow) 1985-11-12 1985-11-12

Publications (1)

Publication Number Publication Date
JPS6282560U true JPS6282560U (enrdf_load_stackoverflow) 1987-05-26

Family

ID=31113008

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17453585U Pending JPS6282560U (enrdf_load_stackoverflow) 1985-11-12 1985-11-12

Country Status (1)

Country Link
JP (1) JPS6282560U (enrdf_load_stackoverflow)

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