JPS6176673U - - Google Patents

Info

Publication number
JPS6176673U
JPS6176673U JP16163784U JP16163784U JPS6176673U JP S6176673 U JPS6176673 U JP S6176673U JP 16163784 U JP16163784 U JP 16163784U JP 16163784 U JP16163784 U JP 16163784U JP S6176673 U JPS6176673 U JP S6176673U
Authority
JP
Japan
Prior art keywords
electron beam
sample
lens
electron
mode
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP16163784U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP16163784U priority Critical patent/JPS6176673U/ja
Publication of JPS6176673U publication Critical patent/JPS6176673U/ja
Pending legal-status Critical Current

Links

JP16163784U 1984-10-25 1984-10-25 Pending JPS6176673U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16163784U JPS6176673U (enrdf_load_stackoverflow) 1984-10-25 1984-10-25

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16163784U JPS6176673U (enrdf_load_stackoverflow) 1984-10-25 1984-10-25

Publications (1)

Publication Number Publication Date
JPS6176673U true JPS6176673U (enrdf_load_stackoverflow) 1986-05-23

Family

ID=30719539

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16163784U Pending JPS6176673U (enrdf_load_stackoverflow) 1984-10-25 1984-10-25

Country Status (1)

Country Link
JP (1) JPS6176673U (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2278607A3 (de) * 2009-07-24 2012-10-24 Carl Zeiss NTS GmbH Teilchenstrahlgerät mit einer Blendeneinheit und Verfahren zur Einstellung eines Strahlstroms in einem Teilchenstrahlgerät

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2278607A3 (de) * 2009-07-24 2012-10-24 Carl Zeiss NTS GmbH Teilchenstrahlgerät mit einer Blendeneinheit und Verfahren zur Einstellung eines Strahlstroms in einem Teilchenstrahlgerät
US11139140B2 (en) 2009-07-24 2021-10-05 Carl Zeiss Microscopy Gmbh Particle beam apparatus having an aperture unit and method for setting a beam current in a particle beam apparatus

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