JPS6280326U - - Google Patents

Info

Publication number
JPS6280326U
JPS6280326U JP17177085U JP17177085U JPS6280326U JP S6280326 U JPS6280326 U JP S6280326U JP 17177085 U JP17177085 U JP 17177085U JP 17177085 U JP17177085 U JP 17177085U JP S6280326 U JPS6280326 U JP S6280326U
Authority
JP
Japan
Prior art keywords
thin film
reaction tube
film production
semiconductor epitaxial
epitaxial thin
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP17177085U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP17177085U priority Critical patent/JPS6280326U/ja
Publication of JPS6280326U publication Critical patent/JPS6280326U/ja
Pending legal-status Critical Current

Links

JP17177085U 1985-11-08 1985-11-08 Pending JPS6280326U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17177085U JPS6280326U (enrdf_load_stackoverflow) 1985-11-08 1985-11-08

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17177085U JPS6280326U (enrdf_load_stackoverflow) 1985-11-08 1985-11-08

Publications (1)

Publication Number Publication Date
JPS6280326U true JPS6280326U (enrdf_load_stackoverflow) 1987-05-22

Family

ID=31107703

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17177085U Pending JPS6280326U (enrdf_load_stackoverflow) 1985-11-08 1985-11-08

Country Status (1)

Country Link
JP (1) JPS6280326U (enrdf_load_stackoverflow)

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