JPS6389233U - - Google Patents

Info

Publication number
JPS6389233U
JPS6389233U JP18427086U JP18427086U JPS6389233U JP S6389233 U JPS6389233 U JP S6389233U JP 18427086 U JP18427086 U JP 18427086U JP 18427086 U JP18427086 U JP 18427086U JP S6389233 U JPS6389233 U JP S6389233U
Authority
JP
Japan
Prior art keywords
source
wafer
tube
supersaturated
vapor phase
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP18427086U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP18427086U priority Critical patent/JPS6389233U/ja
Publication of JPS6389233U publication Critical patent/JPS6389233U/ja
Pending legal-status Critical Current

Links

JP18427086U 1986-11-28 1986-11-28 Pending JPS6389233U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18427086U JPS6389233U (enrdf_load_stackoverflow) 1986-11-28 1986-11-28

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18427086U JPS6389233U (enrdf_load_stackoverflow) 1986-11-28 1986-11-28

Publications (1)

Publication Number Publication Date
JPS6389233U true JPS6389233U (enrdf_load_stackoverflow) 1988-06-10

Family

ID=31131786

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18427086U Pending JPS6389233U (enrdf_load_stackoverflow) 1986-11-28 1986-11-28

Country Status (1)

Country Link
JP (1) JPS6389233U (enrdf_load_stackoverflow)

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