JPS6186472U - - Google Patents

Info

Publication number
JPS6186472U
JPS6186472U JP17266784U JP17266784U JPS6186472U JP S6186472 U JPS6186472 U JP S6186472U JP 17266784 U JP17266784 U JP 17266784U JP 17266784 U JP17266784 U JP 17266784U JP S6186472 U JPS6186472 U JP S6186472U
Authority
JP
Japan
Prior art keywords
cap
gas introduction
reaction tube
gas
supply port
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP17266784U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0213494Y2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP17266784U priority Critical patent/JPH0213494Y2/ja
Publication of JPS6186472U publication Critical patent/JPS6186472U/ja
Application granted granted Critical
Publication of JPH0213494Y2 publication Critical patent/JPH0213494Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
JP17266784U 1984-11-14 1984-11-14 Expired JPH0213494Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17266784U JPH0213494Y2 (enrdf_load_stackoverflow) 1984-11-14 1984-11-14

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17266784U JPH0213494Y2 (enrdf_load_stackoverflow) 1984-11-14 1984-11-14

Publications (2)

Publication Number Publication Date
JPS6186472U true JPS6186472U (enrdf_load_stackoverflow) 1986-06-06
JPH0213494Y2 JPH0213494Y2 (enrdf_load_stackoverflow) 1990-04-13

Family

ID=30730330

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17266784U Expired JPH0213494Y2 (enrdf_load_stackoverflow) 1984-11-14 1984-11-14

Country Status (1)

Country Link
JP (1) JPH0213494Y2 (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPH0213494Y2 (enrdf_load_stackoverflow) 1990-04-13

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