JPS6279874U - - Google Patents

Info

Publication number
JPS6279874U
JPS6279874U JP16881685U JP16881685U JPS6279874U JP S6279874 U JPS6279874 U JP S6279874U JP 16881685 U JP16881685 U JP 16881685U JP 16881685 U JP16881685 U JP 16881685U JP S6279874 U JPS6279874 U JP S6279874U
Authority
JP
Japan
Prior art keywords
substrate
film forming
inert gas
line
forming apparatus
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP16881685U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP16881685U priority Critical patent/JPS6279874U/ja
Publication of JPS6279874U publication Critical patent/JPS6279874U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP16881685U 1985-10-31 1985-10-31 Pending JPS6279874U (enExample)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16881685U JPS6279874U (enExample) 1985-10-31 1985-10-31

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16881685U JPS6279874U (enExample) 1985-10-31 1985-10-31

Publications (1)

Publication Number Publication Date
JPS6279874U true JPS6279874U (enExample) 1987-05-21

Family

ID=31102043

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16881685U Pending JPS6279874U (enExample) 1985-10-31 1985-10-31

Country Status (1)

Country Link
JP (1) JPS6279874U (enExample)

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