JPH0289831U - - Google Patents

Info

Publication number
JPH0289831U
JPH0289831U JP17040588U JP17040588U JPH0289831U JP H0289831 U JPH0289831 U JP H0289831U JP 17040588 U JP17040588 U JP 17040588U JP 17040588 U JP17040588 U JP 17040588U JP H0289831 U JPH0289831 U JP H0289831U
Authority
JP
Japan
Prior art keywords
chamber
substrate
heating chamber
cart
bypass passage
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP17040588U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0610680Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP17040588U priority Critical patent/JPH0610680Y2/ja
Publication of JPH0289831U publication Critical patent/JPH0289831U/ja
Application granted granted Critical
Publication of JPH0610680Y2 publication Critical patent/JPH0610680Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
JP17040588U 1988-12-28 1988-12-28 インライン式成膜装置の搬送機構 Expired - Lifetime JPH0610680Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17040588U JPH0610680Y2 (ja) 1988-12-28 1988-12-28 インライン式成膜装置の搬送機構

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17040588U JPH0610680Y2 (ja) 1988-12-28 1988-12-28 インライン式成膜装置の搬送機構

Publications (2)

Publication Number Publication Date
JPH0289831U true JPH0289831U (enExample) 1990-07-17
JPH0610680Y2 JPH0610680Y2 (ja) 1994-03-16

Family

ID=31461317

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17040588U Expired - Lifetime JPH0610680Y2 (ja) 1988-12-28 1988-12-28 インライン式成膜装置の搬送機構

Country Status (1)

Country Link
JP (1) JPH0610680Y2 (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010196116A (ja) * 2009-02-25 2010-09-09 Shimadzu Corp インライン成膜処理装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010196116A (ja) * 2009-02-25 2010-09-09 Shimadzu Corp インライン成膜処理装置

Also Published As

Publication number Publication date
JPH0610680Y2 (ja) 1994-03-16

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