JPS6426364U - - Google Patents

Info

Publication number
JPS6426364U
JPS6426364U JP12100387U JP12100387U JPS6426364U JP S6426364 U JPS6426364 U JP S6426364U JP 12100387 U JP12100387 U JP 12100387U JP 12100387 U JP12100387 U JP 12100387U JP S6426364 U JPS6426364 U JP S6426364U
Authority
JP
Japan
Prior art keywords
substrate
forming apparatus
film forming
thin film
multiple types
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP12100387U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP12100387U priority Critical patent/JPS6426364U/ja
Publication of JPS6426364U publication Critical patent/JPS6426364U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
  • Magnetic Heads (AREA)
JP12100387U 1987-08-07 1987-08-07 Pending JPS6426364U (enExample)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12100387U JPS6426364U (enExample) 1987-08-07 1987-08-07

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12100387U JPS6426364U (enExample) 1987-08-07 1987-08-07

Publications (1)

Publication Number Publication Date
JPS6426364U true JPS6426364U (enExample) 1989-02-14

Family

ID=31367620

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12100387U Pending JPS6426364U (enExample) 1987-08-07 1987-08-07

Country Status (1)

Country Link
JP (1) JPS6426364U (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0975562A (ja) * 1995-09-19 1997-03-25 Kaijirushi Hamono Kaihatsu Center:Kk かみそり

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0975562A (ja) * 1995-09-19 1997-03-25 Kaijirushi Hamono Kaihatsu Center:Kk かみそり

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