JPS6426364U - - Google Patents

Info

Publication number
JPS6426364U
JPS6426364U JP12100387U JP12100387U JPS6426364U JP S6426364 U JPS6426364 U JP S6426364U JP 12100387 U JP12100387 U JP 12100387U JP 12100387 U JP12100387 U JP 12100387U JP S6426364 U JPS6426364 U JP S6426364U
Authority
JP
Japan
Prior art keywords
substrate
forming apparatus
film forming
thin film
multiple types
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP12100387U
Other languages
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP12100387U priority Critical patent/JPS6426364U/ja
Publication of JPS6426364U publication Critical patent/JPS6426364U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
  • Magnetic Heads (AREA)

Description

【図面の簡単な説明】
第１図乃至第４図は本考案の多層薄膜形成装置
のそれぞれ異なる実施例の平面図（第１図及び第
３図）と側面図（第２図及び第４図）、第５図は
従来装置の側面図である。 １……真空槽、２，３，１５ａ，１５ｂ，１６
ａ，１６ｂ，１７ａ，１７ｂ，１８ａ，１８ｂ，
１９……ターゲツト電極、４，１３，１４……テ
ーブル、ＦＭＡ……搬送装置、５……レール、６
……ベルト、７，８……プーリ、９，１０……案
内ローラ、１１，１２……ローラ。

Claims (1)

    【実用新案登録請求の範囲】
  1. スパツタリング法の適用により基板に複数種類
    の物質の薄膜を順次に付着形成させるようにする
    多層薄膜形成装置であつて、真空槽内における基
    板の設置面以外の面に、前記した基板を取囲むよ
    うな配置態様で複数種類のターゲツト電極を配置
    してなる多層薄膜形成装置。
JP12100387U 1987-08-07 1987-08-07 Pending JPS6426364U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12100387U JPS6426364U (ja) 1987-08-07 1987-08-07

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12100387U JPS6426364U (ja) 1987-08-07 1987-08-07

Publications (1)

Publication Number Publication Date
JPS6426364U true JPS6426364U (ja) 1989-02-14

Family

ID=31367620

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12100387U Pending JPS6426364U (ja) 1987-08-07 1987-08-07

Country Status (1)

Country Link
JP (1) JPS6426364U (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0975562A (ja) * 1995-09-19 1997-03-25 Kaijirushi Hamono Kaihatsu Center:Kk かみそり

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0975562A (ja) * 1995-09-19 1997-03-25 Kaijirushi Hamono Kaihatsu Center:Kk かみそり

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