JPS6273530A - イオン源 - Google Patents

イオン源

Info

Publication number
JPS6273530A
JPS6273530A JP21416885A JP21416885A JPS6273530A JP S6273530 A JPS6273530 A JP S6273530A JP 21416885 A JP21416885 A JP 21416885A JP 21416885 A JP21416885 A JP 21416885A JP S6273530 A JPS6273530 A JP S6273530A
Authority
JP
Japan
Prior art keywords
plasma chamber
chamber
plasma
ion source
wall
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP21416885A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0564408B2 (enrdf_load_html_response
Inventor
Shinya Sekimoto
関本　信也
Isao Hashimoto
勲 橋本
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP21416885A priority Critical patent/JPS6273530A/ja
Publication of JPS6273530A publication Critical patent/JPS6273530A/ja
Publication of JPH0564408B2 publication Critical patent/JPH0564408B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Electron Sources, Ion Sources (AREA)
JP21416885A 1985-09-27 1985-09-27 イオン源 Granted JPS6273530A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP21416885A JPS6273530A (ja) 1985-09-27 1985-09-27 イオン源

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP21416885A JPS6273530A (ja) 1985-09-27 1985-09-27 イオン源

Publications (2)

Publication Number Publication Date
JPS6273530A true JPS6273530A (ja) 1987-04-04
JPH0564408B2 JPH0564408B2 (enrdf_load_html_response) 1993-09-14

Family

ID=16651359

Family Applications (1)

Application Number Title Priority Date Filing Date
JP21416885A Granted JPS6273530A (ja) 1985-09-27 1985-09-27 イオン源

Country Status (1)

Country Link
JP (1) JPS6273530A (enrdf_load_html_response)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62165839A (ja) * 1986-01-16 1987-07-22 Nissin Electric Co Ltd イオン源用ア−クチヤンバ−装置
JP2007165107A (ja) * 2005-12-14 2007-06-28 Jeol Ltd イオン源

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62165839A (ja) * 1986-01-16 1987-07-22 Nissin Electric Co Ltd イオン源用ア−クチヤンバ−装置
JP2007165107A (ja) * 2005-12-14 2007-06-28 Jeol Ltd イオン源

Also Published As

Publication number Publication date
JPH0564408B2 (enrdf_load_html_response) 1993-09-14

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Legal Events

Date Code Title Description
LAPS Cancellation because of no payment of annual fees