JPS6272598A - 炭化珪素単結晶基板の製造方法 - Google Patents

炭化珪素単結晶基板の製造方法

Info

Publication number
JPS6272598A
JPS6272598A JP21591185A JP21591185A JPS6272598A JP S6272598 A JPS6272598 A JP S6272598A JP 21591185 A JP21591185 A JP 21591185A JP 21591185 A JP21591185 A JP 21591185A JP S6272598 A JPS6272598 A JP S6272598A
Authority
JP
Japan
Prior art keywords
single crystal
silicon carbide
crystal substrate
carbide single
thin film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP21591185A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0324439B2 (enrdf_load_html_response
Inventor
Masaki Furukawa
勝紀 古川
Akira Suzuki
彰 鈴木
Mitsuhiro Shigeta
光浩 繁田
Atsuko Uemoto
植本　敦子
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sharp Corp
Original Assignee
Sharp Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sharp Corp filed Critical Sharp Corp
Priority to JP21591185A priority Critical patent/JPS6272598A/ja
Publication of JPS6272598A publication Critical patent/JPS6272598A/ja
Publication of JPH0324439B2 publication Critical patent/JPH0324439B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
JP21591185A 1985-09-26 1985-09-26 炭化珪素単結晶基板の製造方法 Granted JPS6272598A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP21591185A JPS6272598A (ja) 1985-09-26 1985-09-26 炭化珪素単結晶基板の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP21591185A JPS6272598A (ja) 1985-09-26 1985-09-26 炭化珪素単結晶基板の製造方法

Publications (2)

Publication Number Publication Date
JPS6272598A true JPS6272598A (ja) 1987-04-03
JPH0324439B2 JPH0324439B2 (enrdf_load_html_response) 1991-04-03

Family

ID=16680289

Family Applications (1)

Application Number Title Priority Date Filing Date
JP21591185A Granted JPS6272598A (ja) 1985-09-26 1985-09-26 炭化珪素単結晶基板の製造方法

Country Status (1)

Country Link
JP (1) JPS6272598A (enrdf_load_html_response)

Also Published As

Publication number Publication date
JPH0324439B2 (enrdf_load_html_response) 1991-04-03

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