JPS6272505A - 熱分解窒化ほう素製器物の製造法 - Google Patents
熱分解窒化ほう素製器物の製造法Info
- Publication number
- JPS6272505A JPS6272505A JP21100085A JP21100085A JPS6272505A JP S6272505 A JPS6272505 A JP S6272505A JP 21100085 A JP21100085 A JP 21100085A JP 21100085 A JP21100085 A JP 21100085A JP S6272505 A JPS6272505 A JP S6272505A
- Authority
- JP
- Japan
- Prior art keywords
- boron nitride
- article
- pyrolytic boron
- base material
- vapor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- PZNSFCLAULLKQX-UHFFFAOYSA-N Boron nitride Chemical compound N#B PZNSFCLAULLKQX-UHFFFAOYSA-N 0.000 title claims abstract description 44
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims abstract description 23
- 229910002804 graphite Inorganic materials 0.000 claims abstract description 22
- 239000010439 graphite Substances 0.000 claims abstract description 22
- 238000000034 method Methods 0.000 claims abstract description 22
- 238000007740 vapor deposition Methods 0.000 claims abstract description 16
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 claims abstract description 10
- 229910021529 ammonia Inorganic materials 0.000 claims abstract description 5
- 229910052796 boron Inorganic materials 0.000 claims abstract description 5
- -1 boron halide Chemical class 0.000 claims abstract description 5
- 238000005229 chemical vapour deposition Methods 0.000 claims abstract description 5
- 239000000463 material Substances 0.000 claims description 34
- 238000004519 manufacturing process Methods 0.000 claims description 14
- 238000000151 deposition Methods 0.000 claims description 12
- 239000002994 raw material Substances 0.000 claims description 8
- 230000008021 deposition Effects 0.000 claims description 7
- 238000001816 cooling Methods 0.000 claims description 6
- 239000000758 substrate Substances 0.000 abstract description 13
- 230000003139 buffering effect Effects 0.000 abstract 1
- 239000007858 starting material Substances 0.000 abstract 1
- 150000001875 compounds Chemical class 0.000 description 6
- 230000000704 physical effect Effects 0.000 description 5
- 239000004065 semiconductor Substances 0.000 description 5
- 239000013078 crystal Substances 0.000 description 4
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 3
- 238000006243 chemical reaction Methods 0.000 description 3
- 230000008020 evaporation Effects 0.000 description 3
- 238000001704 evaporation Methods 0.000 description 3
- 230000015572 biosynthetic process Effects 0.000 description 2
- 238000011109 contamination Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000012535 impurity Substances 0.000 description 2
- 230000008018 melting Effects 0.000 description 2
- 238000002844 melting Methods 0.000 description 2
- 238000001451 molecular beam epitaxy Methods 0.000 description 2
- 230000003746 surface roughness Effects 0.000 description 2
- 238000003786 synthesis reaction Methods 0.000 description 2
- FAQYAMRNWDIXMY-UHFFFAOYSA-N trichloroborane Chemical compound ClB(Cl)Cl FAQYAMRNWDIXMY-UHFFFAOYSA-N 0.000 description 2
- 229910052582 BN Inorganic materials 0.000 description 1
- 206010062717 Increased upper airway secretion Diseases 0.000 description 1
- 238000010306 acid treatment Methods 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000002349 favourable effect Effects 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229910001092 metal group alloy Inorganic materials 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 208000026435 phlegm Diseases 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 238000001556 precipitation Methods 0.000 description 1
- 238000012827 research and development Methods 0.000 description 1
- 238000007790 scraping Methods 0.000 description 1
- 238000003892 spreading Methods 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Chemical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP21100085A JPS6272505A (ja) | 1985-09-26 | 1985-09-26 | 熱分解窒化ほう素製器物の製造法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP21100085A JPS6272505A (ja) | 1985-09-26 | 1985-09-26 | 熱分解窒化ほう素製器物の製造法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6272505A true JPS6272505A (ja) | 1987-04-03 |
| JPH0456766B2 JPH0456766B2 (enrdf_load_stackoverflow) | 1992-09-09 |
Family
ID=16598664
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP21100085A Granted JPS6272505A (ja) | 1985-09-26 | 1985-09-26 | 熱分解窒化ほう素製器物の製造法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6272505A (enrdf_load_stackoverflow) |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0431309A (ja) * | 1990-05-24 | 1992-02-03 | Shin Etsu Chem Co Ltd | 熱分解窒化ほう素成形体の製造方法 |
| JPH05105523A (ja) * | 1991-10-17 | 1993-04-27 | Shin Etsu Chem Co Ltd | 熱分解窒化ほう素成形体の製造方法 |
| US5372178A (en) * | 1989-01-13 | 1994-12-13 | Lanxide Technology Company, Lp | Method of producing ceramic composite bodies |
| KR100570849B1 (ko) * | 1995-10-03 | 2006-09-15 | 어드밴스트 세라믹스 코포레이션 | 열분해성질화붕소콤팩트와그의제조방법 |
| JP2011507795A (ja) * | 2007-12-31 | 2011-03-10 | モーメンティブ パフォーマンス マテリアルズ インコーポレイテッド | 低熱伝導率低密度熱分解窒化ホウ素材料、製造方法およびそれから製造した物品 |
| JP2013234369A (ja) * | 2012-05-10 | 2013-11-21 | Shin-Etsu Chemical Co Ltd | グラファイト材に熱分解窒化ほう素をコーティングする方法及びその方法によって得られた被覆物 |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS51109912A (enrdf_load_stackoverflow) * | 1975-02-27 | 1976-09-29 | Union Carbide Corp | |
| JPS56141829A (en) * | 1980-04-04 | 1981-11-05 | Agency Of Ind Science & Technol | Production of bulk material by vapor phase depositing method |
| JPS57111211A (en) * | 1980-12-25 | 1982-07-10 | Agency Of Ind Science & Technol | Preparation of polycrystalline znse bulk |
-
1985
- 1985-09-26 JP JP21100085A patent/JPS6272505A/ja active Granted
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS51109912A (enrdf_load_stackoverflow) * | 1975-02-27 | 1976-09-29 | Union Carbide Corp | |
| JPS56141829A (en) * | 1980-04-04 | 1981-11-05 | Agency Of Ind Science & Technol | Production of bulk material by vapor phase depositing method |
| JPS57111211A (en) * | 1980-12-25 | 1982-07-10 | Agency Of Ind Science & Technol | Preparation of polycrystalline znse bulk |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5372178A (en) * | 1989-01-13 | 1994-12-13 | Lanxide Technology Company, Lp | Method of producing ceramic composite bodies |
| JPH0431309A (ja) * | 1990-05-24 | 1992-02-03 | Shin Etsu Chem Co Ltd | 熱分解窒化ほう素成形体の製造方法 |
| JPH05105523A (ja) * | 1991-10-17 | 1993-04-27 | Shin Etsu Chem Co Ltd | 熱分解窒化ほう素成形体の製造方法 |
| KR100570849B1 (ko) * | 1995-10-03 | 2006-09-15 | 어드밴스트 세라믹스 코포레이션 | 열분해성질화붕소콤팩트와그의제조방법 |
| JP2011507795A (ja) * | 2007-12-31 | 2011-03-10 | モーメンティブ パフォーマンス マテリアルズ インコーポレイテッド | 低熱伝導率低密度熱分解窒化ホウ素材料、製造方法およびそれから製造した物品 |
| JP2013234369A (ja) * | 2012-05-10 | 2013-11-21 | Shin-Etsu Chemical Co Ltd | グラファイト材に熱分解窒化ほう素をコーティングする方法及びその方法によって得られた被覆物 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0456766B2 (enrdf_load_stackoverflow) | 1992-09-09 |
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