JPS6271811A - 変位変換器 - Google Patents

変位変換器

Info

Publication number
JPS6271811A
JPS6271811A JP21333485A JP21333485A JPS6271811A JP S6271811 A JPS6271811 A JP S6271811A JP 21333485 A JP21333485 A JP 21333485A JP 21333485 A JP21333485 A JP 21333485A JP S6271811 A JPS6271811 A JP S6271811A
Authority
JP
Japan
Prior art keywords
lens
position sensor
measured
displacement
light
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP21333485A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0528761B2 (enrdf_load_stackoverflow
Inventor
Kenta Mikuriya
健太 御厨
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Yokogawa Electric Corp
Original Assignee
Yokogawa Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Yokogawa Electric Corp filed Critical Yokogawa Electric Corp
Priority to JP21333485A priority Critical patent/JPS6271811A/ja
Publication of JPS6271811A publication Critical patent/JPS6271811A/ja
Publication of JPH0528761B2 publication Critical patent/JPH0528761B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)
  • Measurement Of Optical Distance (AREA)
  • Automatic Focus Adjustment (AREA)
JP21333485A 1985-09-26 1985-09-26 変位変換器 Granted JPS6271811A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP21333485A JPS6271811A (ja) 1985-09-26 1985-09-26 変位変換器

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP21333485A JPS6271811A (ja) 1985-09-26 1985-09-26 変位変換器

Publications (2)

Publication Number Publication Date
JPS6271811A true JPS6271811A (ja) 1987-04-02
JPH0528761B2 JPH0528761B2 (enrdf_load_stackoverflow) 1993-04-27

Family

ID=16637433

Family Applications (1)

Application Number Title Priority Date Filing Date
JP21333485A Granted JPS6271811A (ja) 1985-09-26 1985-09-26 変位変換器

Country Status (1)

Country Link
JP (1) JPS6271811A (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPH0528761B2 (enrdf_load_stackoverflow) 1993-04-27

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