JPS6269173A - Testing device - Google Patents

Abstract

PURPOSE:To execute a continuous test at every test head by inputting the number of times of a continuous test at every test head, and counting its number of times of the test. CONSTITUTION:The test of an object group to be tested A of the test head 7 is executed once by a test head 7', but on the other hand, in case the continuous tests of (l) times are executed by the head 7, its number of times is set to a frequency input part 10, and the number of times 1 is set to the input part 10' of the head 7' side. When the n-th test of an object group to be tested B is ended, a control part 2 reads (l) times of the frequency data of an input part 10, sets the number of times (l) to a counter circuit 12, and starts the (m+1)th test of the object group to be tested A of the head 7. When this test is ended, a handling device 8 installs the next (m+2)th object to be tested, to the head 7, outputs a test request signal to the control part 2, and subtracts '1' from the continuous frequency value (l) of a circuit 12 as soon as the test is started. This operation is repeated until the continuous frequency value of the circuit 12 becomes '1'. Accordingly, the continuous test to (l) pieces of the (m+1)th to the (m+l)th objects to be tested, in the group to be tested A can be executed by the head 7.

Description

[Detailed description of the invention] [Industrial application field] The present invention relates to a testing device for semiconductor integrated circuits, etc.

[Conventional technology]

Most test equipment (hereinafter referred to as testers) used for testing and inspecting the electrical characteristics of semiconductor integrated circuits has multiple test heads, and each test head has a test object attached to it. S handling device (f' rover,
handler, etc.). FIG. 3 is a diagram showing an outline of the entire test apparatus consisting of a tester having two test heads and a handling device for mounting a test object on a test throat for each test head. (shown in the figure) is 1
is the tester body, 2 is the control section, 3 is the measurement section, 4 is the multiplexer, 5 +6+6'L919' is the cable, 7 +
7' lJi test head, 8. 8' is a handling device, A and B are a group of test objects, and a and b are each one test object in test objects #A and B.

Normally, the measuring section 3 is expensive and dusty, and there is no
When only the stand is installed and the test object is tested using both test heads 7 and 7', the measurement section 3 is controlled by the control section 2.
is connected to each test head 7, 7' by switching by multiplexer 4, and each test head is tested alternately.

The flow of this first test is shown in Figure 4.

At the same time as the test ends with test head 7! Ti! The I control section 2 is on the waiting test head 7' side (C multitub).

Switch the lexer 4 and connect the measuring section 3 to the cables 5 and 6'.
Connect to retest node 7' and test the object under test [J(
Start from 1. Meanwhile, on the test head 7 side, the next test object a
is attached to the test head 7 by the handling device 8, and after the attachment is completed, the handling device 8 outputs a test request signal to the control section 2 via the cable 9. The control section 2 causes the test head ``'' 7 to stand by until the measurement section 3 is ready for use, that is, until the test with the test head 7' is completed. When the test with the test head 7' is completed, the control section 2 switches the mano-sci multiplexer 4, and the measurement section 3 is connected to the test head 7'.
Connect to and start testing the test object λ.

Meanwhile, on the test head 7' side, the next destruction, the test object...
It is attached to the test head 7' by the nodding device 8', and after the attachment is completed, the cable 1]' is inserted from the handling device 8'.
A test request signal is output to the control unit 2 via the measuring unit 3.
wait until it becomes available.

In this manner, when a test object is tested using both test heads in a tester having two test heads, each test head is used to perform the test once at a time.

[Problem that the invention seeks to solve]

When the above-mentioned conventional desk with two test heads alternately tests the test object on both the test heads, each test head alternately tests the object once, so the test object on one test head is tested alternately. When testing a product in advance, it is necessary to temporarily suspend the test on the other test head and test it continuously by operating only one test head, which is inconvenient in terms of operation. be.

The present invention solves the above-mentioned problems17 and provides a testing device that enables continuous testing for each test head.

[Failure to solve the problem]

The test device of the present invention includes an input section for specifying the number of consecutive tests for each test head, a counter circuit for counting the number of consecutive tests, and a counter circuit for counting the number of consecutive tests until the counted number of consecutive tests reaches the specified number of consecutive tests. The present invention is characterized in that it has a control section that performs tests continuously using the same test head.

〔Example〕

Next, an embodiment of the present invention>ζ will be described with reference to the drawings.

FIG. 1 is a schematic diagram of an embodiment of the present invention. Reference numerals 1.3 to 8.8', A, a, B, and b in the figure have the same configuration as in FIG. 3 described above. The present invention applies to each test head 7.
It has an input section 10 and 10' for specifying the number of consecutive tests every 7', a counter circuit 12 for counting the number of speed reading tests, and a control section 2. 11.11' is a cable.

FIG. 2 is a timing diagram illustrating the operation of two test heads according to one embodiment of the present invention. In the embodiment, in order to precede the test of the test object group A of the test head 7 without interrupting the test of the test object group B of the other test head 7', the test head 7' is tested once. In contrast, to perform four consecutive tests with the test head 7, the number t is entered in the continuous test number input section 10 on the test head 7 side, and the number is entered in the continuous test number input section 1σ on the test head 7' side. 1 seven times. Test head 7 (Ii)
Then, the (m+1.) No. H test object of test object group A is...
attached to the test head 7 by a nodding device 8;
I'm waiting.

At the same time as the test of the BOn-th test object in the test head 7' is completed, the control section 2 transmits the number data t set in the continuous test number input section 10 on the test head 7 side via the cable 11. Read the number t, enter the corresponding number of times t in the counter circuit 12 in the control unit 2, and proceed to the test.
The test of the (m+1)th test object A of the test object A is started. When the test of the (m+i)th test object is completed,
...The nodling device 8 prepares the next (m+2)th test object to be mounted on the test head 7, and after the mounting is completed, the control □□
A test request signal is output to section 2 to start the test.

The control unit 2 starts the counter circuit at the same time as the test starts]2
Subtract 1 from the continuous test count value t.

The above-described operation is repeated until the continuous count value of the counter circuit 12 reaches 1. In other words, t test objects from (m+1)th to (m+t)th in test object group A are successively tested.

On the other hand, on the test head 7' side, while the test head 7 is continuously testing, the handling device 8'
The (n+1)th test object is prepared to be mounted on the test henodoor'5, and after the mounting is completed, a test request signal is output to the control section 2 via the cable 9', and the control section 2 waits. If the data is other than 1, it is recognized that one test head is in a continuous test state, and in response to the test request signal from the other test head, the data of the counter circuit 12 becomes 1 to execute the test on that test head. hold until.

When the continuous testing of t test objects is completed at test head °7, the controller 2' responds to the pending test request from the test head 7' via the cable 11' to the test head 7' side. Read the value 1 in the continuous test number input section 10',
The counter circuit 12 in the control unit 2 is set to 1, and the test head 7' starts testing the (n", 1)th DUT of the DUT group B. Meanwhile, the test head 7 The (m-+4+4)-th object of object group A is prepared for mounting, outputs a test request signal, and is on standby. When the test is completed, since the data of the counter circuit 12 is 1,
Start the test on the throat 7 side.

In this way, the test head 7 side performs continuous tests on 1,2 test objects, while the test head 7' side performs tests on one test object.

〔Effect of the invention〕

As explained above, according to the tester of the present invention, when testing the test object alternately with two test heads, one test head can perform continuous testing for each test. If the test of the test object in 4. is preceded by the test of the other test object, 4. This has the effect that testing of the test object in mode 7 and = can be performed without interrupting the operation.

[Brief explanation of drawings]

Figures 1 and 2 show embodiments of the present invention.
The figure is a schematic diagram of the tester and handling charge according to the present invention,
Figure 2 is a timing diagram showing the processing status of each test head according to the present invention; Figure 3 is a schematic diagram of a conventional tester and handling device; Figures 1 and 1 are timing diagrams showing the processing status of each conventional test head. It is a diagram. ■... Tester body, 2... Control section, 3... Measurement section,
4...Multiplexer, 5, 6.6', 9.9', 1
1.11'...Cable, 7.7'...Test head, 8,8'...Handling device, 10.10'...
...Continuous test number input section, 12...Counter circuit, A
, B... Test object group, a... One test object in test object group A, b... One test object in failed test object group B.

Claims (1)

[Claims] (1) In a test device having multiple test heads,
means for specifying the number of consecutive tests for each test head; means for counting the number of consecutive tests; and means for continuously testing with the same test head until the counted number of consecutive tests reaches the specified number of consecutive tests. A test device characterized in that it has a control section that performs the test.