JPS6262464B2 - - Google Patents

Info

Publication number
JPS6262464B2
JPS6262464B2 JP53146237A JP14623778A JPS6262464B2 JP S6262464 B2 JPS6262464 B2 JP S6262464B2 JP 53146237 A JP53146237 A JP 53146237A JP 14623778 A JP14623778 A JP 14623778A JP S6262464 B2 JPS6262464 B2 JP S6262464B2
Authority
JP
Japan
Prior art keywords
etching
insulating layer
photoresist
layer
isolation insulating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP53146237A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5572052A (en
Inventor
Akira Tabata
Junosuke Kawabe
Chuichi Takada
Ryoji Abe
Yoshinobu Monma
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP14623778A priority Critical patent/JPS5572052A/ja
Publication of JPS5572052A publication Critical patent/JPS5572052A/ja
Publication of JPS6262464B2 publication Critical patent/JPS6262464B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Local Oxidation Of Silicon (AREA)
  • Drying Of Semiconductors (AREA)
  • Element Separation (AREA)
JP14623778A 1978-11-27 1978-11-27 Preparation of semiconductor device Granted JPS5572052A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14623778A JPS5572052A (en) 1978-11-27 1978-11-27 Preparation of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14623778A JPS5572052A (en) 1978-11-27 1978-11-27 Preparation of semiconductor device

Publications (2)

Publication Number Publication Date
JPS5572052A JPS5572052A (en) 1980-05-30
JPS6262464B2 true JPS6262464B2 (enExample) 1987-12-26

Family

ID=15403195

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14623778A Granted JPS5572052A (en) 1978-11-27 1978-11-27 Preparation of semiconductor device

Country Status (1)

Country Link
JP (1) JPS5572052A (enExample)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56160050A (en) * 1980-05-14 1981-12-09 Fujitsu Ltd Semiconductor device and manufacture thereof
JPS5896751A (ja) * 1981-12-03 1983-06-08 Seiko Epson Corp 半導体装置
JPS58101066U (ja) * 1981-12-29 1983-07-09 日産ディーゼル工業株式会社 機関冷却水通路のサ−モスタツト装置

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5158071A (ja) * 1974-11-18 1976-05-21 Nichiden Varian Kk Supatsutaetsuchinguho
CA1090006A (en) * 1976-12-27 1980-11-18 Wolfgang M. Feist Semiconductor structures and methods for manufacturing such structures

Also Published As

Publication number Publication date
JPS5572052A (en) 1980-05-30

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