JPS6262459B2 - - Google Patents
Info
- Publication number
- JPS6262459B2 JPS6262459B2 JP54109952A JP10995279A JPS6262459B2 JP S6262459 B2 JPS6262459 B2 JP S6262459B2 JP 54109952 A JP54109952 A JP 54109952A JP 10995279 A JP10995279 A JP 10995279A JP S6262459 B2 JPS6262459 B2 JP S6262459B2
- Authority
- JP
- Japan
- Prior art keywords
- charge
- value
- thickness
- semiconductor wafer
- semiconductor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02107—Forming insulating materials on a substrate
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02107—Forming insulating materials on a substrate
- H01L21/02225—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer
- H01L21/02227—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a process other than a deposition process
- H01L21/02258—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a process other than a deposition process formation by anodic treatment, e.g. anodic oxidation
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
- Formation Of Insulating Films (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10995279A JPS5633842A (en) | 1979-08-28 | 1979-08-28 | Manufacture of semiconductor device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10995279A JPS5633842A (en) | 1979-08-28 | 1979-08-28 | Manufacture of semiconductor device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5633842A JPS5633842A (en) | 1981-04-04 |
| JPS6262459B2 true JPS6262459B2 (enrdf_load_stackoverflow) | 1987-12-26 |
Family
ID=14523281
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10995279A Granted JPS5633842A (en) | 1979-08-28 | 1979-08-28 | Manufacture of semiconductor device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5633842A (enrdf_load_stackoverflow) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0492658U (enrdf_load_stackoverflow) * | 1990-12-29 | 1992-08-12 |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3827949A (en) * | 1972-03-29 | 1974-08-06 | Ibm | Anodic oxide passivated planar aluminum metallurgy system and method of producing |
-
1979
- 1979-08-28 JP JP10995279A patent/JPS5633842A/ja active Granted
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0492658U (enrdf_load_stackoverflow) * | 1990-12-29 | 1992-08-12 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5633842A (en) | 1981-04-04 |
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