JPS6262437B2 - - Google Patents
Info
- Publication number
- JPS6262437B2 JPS6262437B2 JP58203370A JP20337083A JPS6262437B2 JP S6262437 B2 JPS6262437 B2 JP S6262437B2 JP 58203370 A JP58203370 A JP 58203370A JP 20337083 A JP20337083 A JP 20337083A JP S6262437 B2 JPS6262437 B2 JP S6262437B2
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- transparent electrode
- electrode
- thin film
- dielectric layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000000758 substrate Substances 0.000 claims description 25
- 239000010409 thin film Substances 0.000 claims description 22
- 239000011159 matrix material Substances 0.000 claims description 4
- 230000005684 electric field Effects 0.000 description 7
- 238000000034 method Methods 0.000 description 5
- 239000000463 material Substances 0.000 description 3
- 239000008188 pellet Substances 0.000 description 3
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 description 2
- 238000005566 electron beam evaporation Methods 0.000 description 2
- 239000010408 film Substances 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 230000005283 ground state Effects 0.000 description 2
- 238000001259 photo etching Methods 0.000 description 2
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 1
- -1 Si 3 N 4 Inorganic materials 0.000 description 1
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- 229910006404 SnO 2 Inorganic materials 0.000 description 1
- 229910010413 TiO 2 Inorganic materials 0.000 description 1
- 239000013543 active substance Substances 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005401 electroluminescence Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000004020 luminiscence type Methods 0.000 description 1
- 238000005268 plasma chemical vapour deposition Methods 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 238000012827 research and development Methods 0.000 description 1
- SBIBMFFZSBJNJF-UHFFFAOYSA-N selenium;zinc Chemical compound [Se]=[Zn] SBIBMFFZSBJNJF-UHFFFAOYSA-N 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 238000007738 vacuum evaporation Methods 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
Landscapes
- Devices For Indicating Variable Information By Combining Individual Elements (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP58203370A JPS6095888A (ja) | 1983-10-28 | 1983-10-28 | 薄膜ｅｌ素子 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP58203370A JPS6095888A (ja) | 1983-10-28 | 1983-10-28 | 薄膜ｅｌ素子 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6095888A JPS6095888A (ja) | 1985-05-29 |
| JPS6262437B2 true JPS6262437B2 (sv) | 1987-12-26 |
Family
ID=16472903
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP58203370A Granted JPS6095888A (ja) | 1983-10-28 | 1983-10-28 | 薄膜ｅｌ素子 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6095888A (sv) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61224293A (ja) * | 1985-03-28 | 1986-10-04 | ホ−ヤ株式会社 | 透明導電膜パタ−ン付き基板とその製造方法 |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58154107A (ja) * | 1982-03-09 | 1983-09-13 | 富士通株式会社 | 電極基板の製造方法 |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS54146167U (sv) * | 1978-03-31 | 1979-10-11 |
-
1983
- 1983-10-28 JP JP58203370A patent/JPS6095888A/ja active Granted
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58154107A (ja) * | 1982-03-09 | 1983-09-13 | 富士通株式会社 | 電極基板の製造方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6095888A (ja) | 1985-05-29 |
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