JPS6262435B2 - - Google Patents

Info

Publication number
JPS6262435B2
JPS6262435B2 JP16446681A JP16446681A JPS6262435B2 JP S6262435 B2 JPS6262435 B2 JP S6262435B2 JP 16446681 A JP16446681 A JP 16446681A JP 16446681 A JP16446681 A JP 16446681A JP S6262435 B2 JPS6262435 B2 JP S6262435B2
Authority
JP
Japan
Prior art keywords
groove
door
radio wave
heating chamber
chiyoke
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP16446681A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5866287A (ja
Inventor
Yasushi Iwabuchi
Tadashi Funamizu
Tetsuo Kubota
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Netsu Kigu KK
Original Assignee
Hitachi Netsu Kigu KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Netsu Kigu KK filed Critical Hitachi Netsu Kigu KK
Priority to JP16446681A priority Critical patent/JPS5866287A/ja
Publication of JPS5866287A publication Critical patent/JPS5866287A/ja
Publication of JPS6262435B2 publication Critical patent/JPS6262435B2/ja
Granted legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05BELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B6/00Heating by electric, magnetic or electromagnetic fields
    • H05B6/64Heating using microwaves
    • H05B6/76Prevention of microwave leakage, e.g. door sealings
    • H05B6/763Microwave radiation seals for doors

Landscapes

  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Constitution Of High-Frequency Heating (AREA)
  • Shielding Devices Or Components To Electric Or Magnetic Fields (AREA)
JP16446681A 1981-10-15 1981-10-15 高周波加熱装置 Granted JPS5866287A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16446681A JPS5866287A (ja) 1981-10-15 1981-10-15 高周波加熱装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16446681A JPS5866287A (ja) 1981-10-15 1981-10-15 高周波加熱装置

Publications (2)

Publication Number Publication Date
JPS5866287A JPS5866287A (ja) 1983-04-20
JPS6262435B2 true JPS6262435B2 (fr) 1987-12-26

Family

ID=15793708

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16446681A Granted JPS5866287A (ja) 1981-10-15 1981-10-15 高周波加熱装置

Country Status (1)

Country Link
JP (1) JPS5866287A (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2771340B2 (ja) * 1991-03-28 1998-07-02 日本電気株式会社 半導体製造装置

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0526717Y2 (fr) * 1986-06-17 1993-07-06
CN108886845B (zh) 2016-03-25 2022-02-18 松下知识产权经营株式会社 高频加热装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2771340B2 (ja) * 1991-03-28 1998-07-02 日本電気株式会社 半導体製造装置

Also Published As

Publication number Publication date
JPS5866287A (ja) 1983-04-20

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