JPS6259626B2 - - Google Patents

Info

Publication number
JPS6259626B2
JPS6259626B2 JP56169463A JP16946381A JPS6259626B2 JP S6259626 B2 JPS6259626 B2 JP S6259626B2 JP 56169463 A JP56169463 A JP 56169463A JP 16946381 A JP16946381 A JP 16946381A JP S6259626 B2 JPS6259626 B2 JP S6259626B2
Authority
JP
Japan
Prior art keywords
opening
reaction tube
heat treatment
gas
cover
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP56169463A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5870832A (ja
Inventor
Keiji Watanabe
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Kyushu Ltd
Original Assignee
NEC Kyushu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Kyushu Ltd filed Critical NEC Kyushu Ltd
Priority to JP16946381A priority Critical patent/JPS5870832A/ja
Publication of JPS5870832A publication Critical patent/JPS5870832A/ja
Publication of JPS6259626B2 publication Critical patent/JPS6259626B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Physical Or Chemical Processes And Apparatus (AREA)
JP16946381A 1981-10-23 1981-10-23 加熱処理システム Granted JPS5870832A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16946381A JPS5870832A (ja) 1981-10-23 1981-10-23 加熱処理システム

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16946381A JPS5870832A (ja) 1981-10-23 1981-10-23 加熱処理システム

Publications (2)

Publication Number Publication Date
JPS5870832A JPS5870832A (ja) 1983-04-27
JPS6259626B2 true JPS6259626B2 (cg-RX-API-DMAC7.html) 1987-12-11

Family

ID=15887032

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16946381A Granted JPS5870832A (ja) 1981-10-23 1981-10-23 加熱処理システム

Country Status (1)

Country Link
JP (1) JPS5870832A (cg-RX-API-DMAC7.html)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0640427A (ja) * 1991-02-08 1994-02-15 Nagasaki Kiki Mfg Co Ltd 自動袋詰機の自動給袋装置

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2775079B2 (ja) * 1989-10-25 1998-07-09 ニッタ・ムアー株式会社 管継手

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53106573A (en) * 1977-02-28 1978-09-16 Nec Corp Gas treatment method of semiconductor wafers
JPS552612U (cg-RX-API-DMAC7.html) * 1978-06-17 1980-01-09

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0640427A (ja) * 1991-02-08 1994-02-15 Nagasaki Kiki Mfg Co Ltd 自動袋詰機の自動給袋装置

Also Published As

Publication number Publication date
JPS5870832A (ja) 1983-04-27

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