JPS6258855U - - Google Patents

Info

Publication number
JPS6258855U
JPS6258855U JP14981885U JP14981885U JPS6258855U JP S6258855 U JPS6258855 U JP S6258855U JP 14981885 U JP14981885 U JP 14981885U JP 14981885 U JP14981885 U JP 14981885U JP S6258855 U JPS6258855 U JP S6258855U
Authority
JP
Japan
Prior art keywords
inductively coupled
gap
coupled plasma
mass spectrometer
insulator
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP14981885U
Other languages
English (en)
Other versions
JPH0336028Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP14981885U priority Critical patent/JPH0336028Y2/ja
Publication of JPS6258855U publication Critical patent/JPS6258855U/ja
Application granted granted Critical
Publication of JPH0336028Y2 publication Critical patent/JPH0336028Y2/ja
Expired legal-status Critical Current

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  • Electron Tubes For Measurement (AREA)

Description

【図面の簡単な説明】
第１図は本考案実施例の要部拡大断面図、第２
図は誘導結合プラズマ・質量分析計の全体的な構
成説明図、第３図は従来例の要部拡大断面図であ
る。 １…プラズマトーチ、５…ネブライザ、６…誘
導コイル、７…高周波電源、９…スキマ、９ａ…
スキマ本体、９ｂ…中心孔、９ｃ…絶縁物、１０
…四重極マスフイルタ、１１…光電子増培管、１
２…信号処理部。

Claims (1)

  1. 【実用新案登録請求の範囲】 (1) 誘導結合プラズマをイオン源として用い該
    プラズマ内のイオンをスキマの中心孔を通して四
    重極マスフイルタで検出する誘導結合プラズマ・
    質量分析計において、前記スキマの先端部に該ス
    キマ本体と一体的に絶縁物を着設し、前記中心孔
    を通るイオンが前記スキマ内に引出されてから加
    速されるように構成したことを特徴とする誘導結
    合プラズマ・質量分析計。 (2) 前記絶縁物はセラミツク若しくはルビーで
    構成されて成る実用新案登録請求の範囲第(1)項
    記載の誘導結合プラズマ・質量分析計。
JP14981885U 1985-09-30 1985-09-30 Expired JPH0336028Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14981885U JPH0336028Y2 (ja) 1985-09-30 1985-09-30

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14981885U JPH0336028Y2 (ja) 1985-09-30 1985-09-30

Publications (2)

Publication Number Publication Date
JPS6258855U true JPS6258855U (ja) 1987-04-11
JPH0336028Y2 JPH0336028Y2 (ja) 1991-07-31

Family

ID=31065383

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14981885U Expired JPH0336028Y2 (ja) 1985-09-30 1985-09-30

Country Status (1)

Country Link
JP (1) JPH0336028Y2 (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH1125903A (ja) * 1997-07-04 1999-01-29 Agency Of Ind Science & Technol 金属−セラミック複合サンプラー及びスキマー

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH1125903A (ja) * 1997-07-04 1999-01-29 Agency Of Ind Science & Technol 金属−セラミック複合サンプラー及びスキマー

Also Published As

Publication number Publication date
JPH0336028Y2 (ja) 1991-07-31

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