JPS6258541B2 - - Google Patents

Info

Publication number
JPS6258541B2
JPS6258541B2 JP56071682A JP7168281A JPS6258541B2 JP S6258541 B2 JPS6258541 B2 JP S6258541B2 JP 56071682 A JP56071682 A JP 56071682A JP 7168281 A JP7168281 A JP 7168281A JP S6258541 B2 JPS6258541 B2 JP S6258541B2
Authority
JP
Japan
Prior art keywords
type semiconductor
electrostatic chuck
semiconductor region
insulating film
semiconductor regions
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP56071682A
Other languages
English (en)
Japanese (ja)
Other versions
JPS57187947A (en
Inventor
Katsuya Okumura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Shibaura Electric Co Ltd filed Critical Tokyo Shibaura Electric Co Ltd
Priority to JP56071682A priority Critical patent/JPS57187947A/ja
Publication of JPS57187947A publication Critical patent/JPS57187947A/ja
Publication of JPS6258541B2 publication Critical patent/JPS6258541B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H10P72/72—
    • H10P72/50—

Landscapes

  • Jigs For Machine Tools (AREA)
JP56071682A 1981-05-13 1981-05-13 Electrostatic chuck Granted JPS57187947A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP56071682A JPS57187947A (en) 1981-05-13 1981-05-13 Electrostatic chuck

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56071682A JPS57187947A (en) 1981-05-13 1981-05-13 Electrostatic chuck

Publications (2)

Publication Number Publication Date
JPS57187947A JPS57187947A (en) 1982-11-18
JPS6258541B2 true JPS6258541B2 (OSRAM) 1987-12-07

Family

ID=13467573

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56071682A Granted JPS57187947A (en) 1981-05-13 1981-05-13 Electrostatic chuck

Country Status (1)

Country Link
JP (1) JPS57187947A (OSRAM)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20190255450A1 (en) * 2018-02-22 2019-08-22 Tomy Company, Ltd. Spinning top toy

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5950537A (ja) * 1982-09-17 1984-03-23 Hitachi Ltd ウエハチヤツク
JPS60130006U (ja) * 1984-02-08 1985-08-31 株式会社　平安鉄工所 座標読取機
US5600530A (en) * 1992-08-04 1997-02-04 The Morgan Crucible Company Plc Electrostatic chuck
WO2008051369A2 (en) * 2006-10-25 2008-05-02 Axcelis Technologies, Inc. Low-cost electrostatic clamp with fast declamp time and the manufacture

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20190255450A1 (en) * 2018-02-22 2019-08-22 Tomy Company, Ltd. Spinning top toy

Also Published As

Publication number Publication date
JPS57187947A (en) 1982-11-18

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