JPS62576B2 - - Google Patents
Info
- Publication number
- JPS62576B2 JPS62576B2 JP14110077A JP14110077A JPS62576B2 JP S62576 B2 JPS62576 B2 JP S62576B2 JP 14110077 A JP14110077 A JP 14110077A JP 14110077 A JP14110077 A JP 14110077A JP S62576 B2 JPS62576 B2 JP S62576B2
- Authority
- JP
- Japan
- Prior art keywords
- value
- detection method
- position detection
- address
- signal
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000001514 detection method Methods 0.000 claims description 32
- 238000003384 imaging method Methods 0.000 claims description 13
- 230000000007 visual effect Effects 0.000 claims description 3
- 238000012935 Averaging Methods 0.000 claims 1
- 238000006073 displacement reaction Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 17
- 238000000605 extraction Methods 0.000 description 9
- 238000000034 method Methods 0.000 description 9
- 239000004065 semiconductor Substances 0.000 description 5
- 238000004364 calculation method Methods 0.000 description 4
- 238000006243 chemical reaction Methods 0.000 description 4
- 230000003287 optical effect Effects 0.000 description 4
- 230000002950 deficient Effects 0.000 description 3
- 230000007547 defect Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 229920003002 synthetic resin Polymers 0.000 description 2
- 239000000057 synthetic resin Substances 0.000 description 2
- 241000766026 Coregonus nasus Species 0.000 description 1
- 230000001186 cumulative effect Effects 0.000 description 1
- 230000006870 function Effects 0.000 description 1
- 238000005286 illumination Methods 0.000 description 1
- 230000004044 response Effects 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14110077A JPS5474376A (en) | 1977-11-26 | 1977-11-26 | Position detection system for semiconductor chip |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14110077A JPS5474376A (en) | 1977-11-26 | 1977-11-26 | Position detection system for semiconductor chip |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP27242285A Division JPS61286706A (ja) | 1985-12-05 | 1985-12-05 | 位置検出方式 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5474376A JPS5474376A (en) | 1979-06-14 |
| JPS62576B2 true JPS62576B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1987-01-08 |
Family
ID=15284180
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14110077A Granted JPS5474376A (en) | 1977-11-26 | 1977-11-26 | Position detection system for semiconductor chip |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5474376A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0037663B1 (en) * | 1980-04-02 | 1986-06-11 | General Signal Corporation | Method and apparatus for positioning a wafer on a flat bed |
| JPS58125837A (ja) * | 1982-01-22 | 1983-07-27 | Mitsubishi Electric Corp | 自動ダイボンダのペレツト位置決め装置 |
| JPS61286706A (ja) * | 1985-12-05 | 1986-12-17 | Toshiba Corp | 位置検出方式 |
-
1977
- 1977-11-26 JP JP14110077A patent/JPS5474376A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5474376A (en) | 1979-06-14 |