JPS5474376A - Position detection system for semiconductor chip - Google Patents
Position detection system for semiconductor chipInfo
- Publication number
- JPS5474376A JPS5474376A JP14110077A JP14110077A JPS5474376A JP S5474376 A JPS5474376 A JP S5474376A JP 14110077 A JP14110077 A JP 14110077A JP 14110077 A JP14110077 A JP 14110077A JP S5474376 A JPS5474376 A JP S5474376A
- Authority
- JP
- Japan
- Prior art keywords
- signal
- subject
- level
- threshold
- group
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Abstract
PURPOSE: To automatize the fabrication of parts, by detecting the position shift of fine parts, which can not be positioned mechanically, by an optical method.
CONSTITUTION: A video signal obtained by picture-taking a group of semiconductor chips by pickup unit 6 is converted by A-D converter 9 into a digital signal synchronizing with the synchronizing signal of pickup unit 6. This digital signal is stored in an address equivalent to two-dimentional coordinates of memory 10, video signals are read out sequentially from memory 10 to find the threshold value by threshold-level calculator 15 judging from the mean values of the high-signal-level region and low-signal-level region, and this threshold level is inputted to subject extraction unit 17 via signal line 16. Next, the group of chips and its circumferential background part are discriminated by the threshold level and the specific subject is extracted from the discriminated chip group through the singal processing; after the extraction, end signal 18 is supplied to chip-difect detector 19 and the position- shift signal of the subject is obtained from data on the extracted subject.
COPYRIGHT: (C)1979,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14110077A JPS5474376A (en) | 1977-11-26 | 1977-11-26 | Position detection system for semiconductor chip |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14110077A JPS5474376A (en) | 1977-11-26 | 1977-11-26 | Position detection system for semiconductor chip |
Related Child Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP27242285A Division JPS61286706A (en) | 1985-12-05 | 1985-12-05 | System for detecting position |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5474376A true JPS5474376A (en) | 1979-06-14 |
JPS62576B2 JPS62576B2 (en) | 1987-01-08 |
Family
ID=15284180
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP14110077A Granted JPS5474376A (en) | 1977-11-26 | 1977-11-26 | Position detection system for semiconductor chip |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5474376A (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS56153747A (en) * | 1980-04-02 | 1981-11-27 | Gen Signal Corp | Positioning system |
JPS58125837A (en) * | 1982-01-22 | 1983-07-27 | Mitsubishi Electric Corp | Positioning device for pellet of automatic die bonder |
JPS61286706A (en) * | 1985-12-05 | 1986-12-17 | Toshiba Corp | System for detecting position |
-
1977
- 1977-11-26 JP JP14110077A patent/JPS5474376A/en active Granted
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS56153747A (en) * | 1980-04-02 | 1981-11-27 | Gen Signal Corp | Positioning system |
JPS58125837A (en) * | 1982-01-22 | 1983-07-27 | Mitsubishi Electric Corp | Positioning device for pellet of automatic die bonder |
JPS6258659B2 (en) * | 1982-01-22 | 1987-12-07 | Mitsubishi Electric Corp | |
JPS61286706A (en) * | 1985-12-05 | 1986-12-17 | Toshiba Corp | System for detecting position |
Also Published As
Publication number | Publication date |
---|---|
JPS62576B2 (en) | 1987-01-08 |
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