JPS5474376A - Position detection system for semiconductor chip - Google Patents

Position detection system for semiconductor chip

Info

Publication number
JPS5474376A
JPS5474376A JP14110077A JP14110077A JPS5474376A JP S5474376 A JPS5474376 A JP S5474376A JP 14110077 A JP14110077 A JP 14110077A JP 14110077 A JP14110077 A JP 14110077A JP S5474376 A JPS5474376 A JP S5474376A
Authority
JP
Japan
Prior art keywords
signal
subject
level
threshold
group
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP14110077A
Other languages
Japanese (ja)
Other versions
JPS62576B2 (en
Inventor
Yoshiaki Arimura
Kazuhiro Tsumura
Yutaka Hitomi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP14110077A priority Critical patent/JPS5474376A/en
Publication of JPS5474376A publication Critical patent/JPS5474376A/en
Publication of JPS62576B2 publication Critical patent/JPS62576B2/ja
Granted legal-status Critical Current

Links

Abstract

PURPOSE: To automatize the fabrication of parts, by detecting the position shift of fine parts, which can not be positioned mechanically, by an optical method.
CONSTITUTION: A video signal obtained by picture-taking a group of semiconductor chips by pickup unit 6 is converted by A-D converter 9 into a digital signal synchronizing with the synchronizing signal of pickup unit 6. This digital signal is stored in an address equivalent to two-dimentional coordinates of memory 10, video signals are read out sequentially from memory 10 to find the threshold value by threshold-level calculator 15 judging from the mean values of the high-signal-level region and low-signal-level region, and this threshold level is inputted to subject extraction unit 17 via signal line 16. Next, the group of chips and its circumferential background part are discriminated by the threshold level and the specific subject is extracted from the discriminated chip group through the singal processing; after the extraction, end signal 18 is supplied to chip-difect detector 19 and the position- shift signal of the subject is obtained from data on the extracted subject.
COPYRIGHT: (C)1979,JPO&Japio
JP14110077A 1977-11-26 1977-11-26 Position detection system for semiconductor chip Granted JPS5474376A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14110077A JPS5474376A (en) 1977-11-26 1977-11-26 Position detection system for semiconductor chip

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14110077A JPS5474376A (en) 1977-11-26 1977-11-26 Position detection system for semiconductor chip

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP27242285A Division JPS61286706A (en) 1985-12-05 1985-12-05 System for detecting position

Publications (2)

Publication Number Publication Date
JPS5474376A true JPS5474376A (en) 1979-06-14
JPS62576B2 JPS62576B2 (en) 1987-01-08

Family

ID=15284180

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14110077A Granted JPS5474376A (en) 1977-11-26 1977-11-26 Position detection system for semiconductor chip

Country Status (1)

Country Link
JP (1) JPS5474376A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56153747A (en) * 1980-04-02 1981-11-27 Gen Signal Corp Positioning system
JPS58125837A (en) * 1982-01-22 1983-07-27 Mitsubishi Electric Corp Positioning device for pellet of automatic die bonder
JPS61286706A (en) * 1985-12-05 1986-12-17 Toshiba Corp System for detecting position

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56153747A (en) * 1980-04-02 1981-11-27 Gen Signal Corp Positioning system
JPS58125837A (en) * 1982-01-22 1983-07-27 Mitsubishi Electric Corp Positioning device for pellet of automatic die bonder
JPS6258659B2 (en) * 1982-01-22 1987-12-07 Mitsubishi Electric Corp
JPS61286706A (en) * 1985-12-05 1986-12-17 Toshiba Corp System for detecting position

Also Published As

Publication number Publication date
JPS62576B2 (en) 1987-01-08

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