JPS6257108B2 - - Google Patents

Info

Publication number
JPS6257108B2
JPS6257108B2 JP54112790A JP11279079A JPS6257108B2 JP S6257108 B2 JPS6257108 B2 JP S6257108B2 JP 54112790 A JP54112790 A JP 54112790A JP 11279079 A JP11279079 A JP 11279079A JP S6257108 B2 JPS6257108 B2 JP S6257108B2
Authority
JP
Japan
Prior art keywords
film
layer
sio
starting substrate
psg
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP54112790A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5637643A (en
Inventor
Koji Kozuka
Hisayuki Higuchi
Masao Kawamura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP11279079A priority Critical patent/JPS5637643A/ja
Publication of JPS5637643A publication Critical patent/JPS5637643A/ja
Publication of JPS6257108B2 publication Critical patent/JPS6257108B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H10W10/011—
    • H10W10/10—

Landscapes

  • Local Oxidation Of Silicon (AREA)
  • Bipolar Transistors (AREA)
  • Element Separation (AREA)
JP11279079A 1979-09-05 1979-09-05 Manufacturing of semiconductor integrated circuit Granted JPS5637643A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11279079A JPS5637643A (en) 1979-09-05 1979-09-05 Manufacturing of semiconductor integrated circuit

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11279079A JPS5637643A (en) 1979-09-05 1979-09-05 Manufacturing of semiconductor integrated circuit

Publications (2)

Publication Number Publication Date
JPS5637643A JPS5637643A (en) 1981-04-11
JPS6257108B2 true JPS6257108B2 (index.php) 1987-11-30

Family

ID=14595574

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11279079A Granted JPS5637643A (en) 1979-09-05 1979-09-05 Manufacturing of semiconductor integrated circuit

Country Status (1)

Country Link
JP (1) JPS5637643A (index.php)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5843572A (ja) * 1981-09-09 1983-03-14 Nec Corp 半導体装置の製造方法

Also Published As

Publication number Publication date
JPS5637643A (en) 1981-04-11

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