JPS6256652B2 - - Google Patents

Info

Publication number
JPS6256652B2
JPS6256652B2 JP17636181A JP17636181A JPS6256652B2 JP S6256652 B2 JPS6256652 B2 JP S6256652B2 JP 17636181 A JP17636181 A JP 17636181A JP 17636181 A JP17636181 A JP 17636181A JP S6256652 B2 JPS6256652 B2 JP S6256652B2
Authority
JP
Japan
Prior art keywords
substrate
substrate support
thin film
spring
chamber
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP17636181A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5878417A (ja
Inventor
Kazuo Nakamura
Shinya Homan
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Anelva Corp
Original Assignee
Canon Anelva Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Anelva Corp filed Critical Canon Anelva Corp
Priority to JP17636181A priority Critical patent/JPS5878417A/ja
Publication of JPS5878417A publication Critical patent/JPS5878417A/ja
Publication of JPS6256652B2 publication Critical patent/JPS6256652B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02104—Forming layers
    • H01L21/02365—Forming inorganic semiconducting materials on a substrate
    • H01L21/02612—Formation types
    • H01L21/02617—Deposition types
    • H01L21/02631—Physical deposition at reduced pressure, e.g. MBE, sputtering, evaporation

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Physical Vapour Deposition (AREA)
  • Electrodes Of Semiconductors (AREA)
  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
JP17636181A 1981-11-05 1981-11-05 薄膜形成真空装置 Granted JPS5878417A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17636181A JPS5878417A (ja) 1981-11-05 1981-11-05 薄膜形成真空装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17636181A JPS5878417A (ja) 1981-11-05 1981-11-05 薄膜形成真空装置

Publications (2)

Publication Number Publication Date
JPS5878417A JPS5878417A (ja) 1983-05-12
JPS6256652B2 true JPS6256652B2 (en, 2012) 1987-11-26

Family

ID=16012263

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17636181A Granted JPS5878417A (ja) 1981-11-05 1981-11-05 薄膜形成真空装置

Country Status (1)

Country Link
JP (1) JPS5878417A (en, 2012)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03105540U (en, 2012) * 1990-02-09 1991-10-31
JPH0592310U (ja) * 1992-05-19 1993-12-17 丸井産業株式会社 構築用スペーサー

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6165421A (ja) * 1984-09-07 1986-04-04 Matsushita Electric Ind Co Ltd プラズマ化学気相堆積装置
JPH036366A (ja) * 1989-06-02 1991-01-11 Nippon Steel Corp 反応蒸着装置用基板ホルダー固定台
JP6484035B2 (ja) * 2015-01-06 2019-03-13 株式会社カネカ 薄膜形成装置及びそれを用いた薄膜の製造方法、並びに有機ｅｌ装置の製造方法

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03105540U (en, 2012) * 1990-02-09 1991-10-31
JPH0592310U (ja) * 1992-05-19 1993-12-17 丸井産業株式会社 構築用スペーサー

Also Published As

Publication number Publication date
JPS5878417A (ja) 1983-05-12

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